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	Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor
	Wang, Z. ; Shi, K. ; Chen, H. ; Feng, F. ; Sun, J. C. ; Han, Z.
	2010-10-12 ; 2010-10-12
关键词	Ion beam assisted deposition Yttria stabilized zirconia Biaxial texture Buffer layer Coated conductor X-ray diffraction Surface morphology MGO THIN-FILMS BIAXIAL ALIGNMENT MECHANISM BOMBARDMENT ORIENTATION MODEL Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter
中文摘要	High quality biaxially textured yttria stabilized zirconia (YSZ) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted deposition (IBAD) method with different assisting ion energy E-i. The roles of assisting ion beam and the influences of ion energy E-i on the structure of the films were Studied. It was found that both the out-of-plane alignment and in-plane texture of the IBAD-YSZ films are sensitive to the variation of E-i. The results are explained in the paper by different damage tolerance of the differently oriented grains to ion bombardment. (C) 2008 Elsevier B.V. All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCIENCE SA ; LAUSANNE ; PO BOX 564, 1001 LAUSANNE, SWITZERLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/81480]
专题	清华大学
推荐引用方式 GB/T 7714	Wang, Z.,Shi, K.,Chen, H.,et al. Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor[J],2010, 2010.
APA	Wang, Z.,Shi, K.,Chen, H.,Feng, F.,Sun, J. C.,&Han, Z..(2010).Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor..
MLA	Wang, Z.,et al."Effects of ion energy on ion beam assisted deposition textured yttria stabilized zirconia buffer layer of coated conductor".(2010).

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