沉积温度对LaF3薄膜性能的影响

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	沉积温度对LaF3薄膜性能的影响; Influence of deposition temperature on properties of LaF₃ coating
	余华 ; 崔云 ; 申雁鸣 ; 齐红基 ; 邵建达 ; 范正修
刊名	强激光与粒子束
	2007
卷号	19 期号:9 页码:1507
关键词	Crystal structure Deposition Grain size and shape Interferometers Lanthanum compounds Refractive index Residual stresses Spectrophotometers Temperature X ray diffraction
其他题名	Influence of deposition temperature on properties of LaF₃ coating
中文摘要	abstract {LaF₃ single-layer coatings were prepared by thermal boat evaporation at the deposition temperatures of 189, 255, 277 and 321°C respectively. The crystal structures of the coatings were characterized by X-ray diffraction (XRD). A spectrophotometer was employed to measure its transmittance. Moreover, refractive index, extinction coefficient and cut-off wavelength were obtained from the measured transmittance spectral curve. The residual stress was evaluated by the Stoney's equation and optical interferometer. Laser induce damage threshold (LIDT) was performed by a tripled Nd:YAG laser system. The results show that the crystallization status becomes better with the deposition temperature increasing. Correspondingly, the grain size also gets larger. Meanwhile, the coatings become more compact and the refractive index increases. However, the absorption of coatings seriously rises and the cut-off wavelength drifts to the long wave. In addition, the residual stress also increases and the intrinsic stress plays a determinant role in the coating. The LIDT of the coating also enhances at high temperature.}
学科主题	光学薄膜
收录类别	EI
语种	中文
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4600]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	余华,崔云,申雁鸣,等. 沉积温度对LaF3薄膜性能的影响, Influence of deposition temperature on properties of LaF₃ coating[J]. 强激光与粒子束,2007,19(9):1507, 1511.
APA	余华,崔云,申雁鸣,齐红基,邵建达,&范正修.(2007).沉积温度对LaF3薄膜性能的影响.强激光与粒子束,19(9),1507.
MLA	余华,et al."沉积温度对LaF3薄膜性能的影响".强激光与粒子束 19.9(2007):1507.