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	Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region
	Lin, Hui ; Zhang, Lichao ; Jin, Chunshui ; Zhou, Hongjun ; Huo, Tonglin
	2010-10-12 ; 2010-10-12
关键词	WAVELENGTH REGION SPECTROMETER DIFFRACTION Optics
中文摘要	We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.
语种	英语 ; 英语
出版者	CHINESE OPTICS LETTERS MANUSCRIPT OFFICE ; SHANGHAI ; PO BOX 800-211, SHANGHAI, 201800, PEOPLES R CHINA
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80457]
专题	清华大学
推荐引用方式 GB/T 7714	Lin, Hui,Zhang, Lichao,Jin, Chunshui,et al. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J],2010, 2010.
APA	Lin, Hui,Zhang, Lichao,Jin, Chunshui,Zhou, Hongjun,&Huo, Tonglin.(2010).Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region..
MLA	Lin, Hui,et al."Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region".(2010).

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