QQ客服 官方微博 反馈留言

	Analyzing the grating profile parameters based on scanning-electron microscope images
	Li, Y. ; Zeng, L.J.
	2010-10-12 ; 2010-10-12
关键词	Experimental/ diffraction gratings optical fabrication optical images scanning electron microscopes/ grating profile parameters scanning-electron microscope images grating fabrication techniques scanning-electron microscope SEM measured diffraction efficiency/ A4280F Gratings, echelles A4230 Optical information, image formation and analysis A0780 Electron and ion microscopes and techniques A4285D Optical fabrication, surface grinding
中文摘要	Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.
语种	英语
出版者	Trans Tech Publications Ltd. ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80295]
专题	清华大学
推荐引用方式 GB/T 7714	Li, Y.,Zeng, L.J.. Analyzing the grating profile parameters based on scanning-electron microscope images[J],2010, 2010.
APA	Li, Y.,&Zeng, L.J..(2010).Analyzing the grating profile parameters based on scanning-electron microscope images..
MLA	Li, Y.,et al."Analyzing the grating profile parameters based on scanning-electron microscope images".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。