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	Design and Analyses of a MEMS Based Resonant Magnetometer
	Ren, Dahai ; Wu, Lingqi ; Yan, Meizhi ; Cui, Mingyang ; You, Zheng ; Hu, Muzhi
	2010-10-12 ; 2010-10-12
关键词	magnetometer MEMS capacitance Lorentz force simulation Chemistry, Analytical Electrochemistry Instruments & Instrumentation
中文摘要	A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/mu T when operating in a 10 Pa vacuum environment.
语种	英语 ; 英语
出版者	MOLECULAR DIVERSITY PRESERVATION INTERNATIONAL-MDPI ; BASEL ; KANDERERSTRASSE 25, CH-4057 BASEL, SWITZERLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80221]
专题	清华大学
推荐引用方式 GB/T 7714	Ren, Dahai,Wu, Lingqi,Yan, Meizhi,et al. Design and Analyses of a MEMS Based Resonant Magnetometer[J],2010, 2010.
APA	Ren, Dahai,Wu, Lingqi,Yan, Meizhi,Cui, Mingyang,You, Zheng,&Hu, Muzhi.(2010).Design and Analyses of a MEMS Based Resonant Magnetometer..
MLA	Ren, Dahai,et al."Design and Analyses of a MEMS Based Resonant Magnetometer".(2010).

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