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	Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture
	Xie, Guoxin ; Liu, Shuhai ; Guo, Dan ; Wang, Quan ; Luo, Jianbin
	2010-10-12 ; 2010-10-12
关键词	Ionic liquid/water Water-based lubrication Running-in process Thin films LIQUIDS CONTACTS WATER ADDITIVES CERAMICS FILMS Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter
中文摘要	The tribological properties of three different films commonly used in microelectromechanical systems (MEMS) under the lubrication of ionic liquid (IL)/water mixtures with various concentrations in the running-in process have been investigated. Results show that coefficients of friction (COFs) and wear rates for low temperature silicon oxide ( LTO)/Si3N4 vary in a similar way to the ones for poly-Si/Si3N4 under the lubrications of different IL/water mixtures. In contrast, the differences in COFs and wear rates are more significant in that the COFs and wear rates increase dramatically with the decrease in IL/water concentration in the case of self-mated Si3N4, while the differences in COFs and wear rates for the two other tribopairs are relatively small when the concentration is changed. The period of the running-in process reduces with the increase in IL/water concentration for all the tribopairs. Effective hydrodynamic lubrication can be found in the case of Si3N4/Si3N4 tribopair at higher IL/water concentrations without an evident running-in process, however, such a phenomenon cannot be observed for the other two tribopairs. Different wear mechanisms will also be analyzed in this paper. (C) 2009 Elsevier B.V. All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCIENCE BV ; AMSTERDAM ; PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80168]
专题	清华大学
推荐引用方式 GB/T 7714	Xie, Guoxin,Liu, Shuhai,Guo, Dan,et al. Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture[J],2010, 2010.
APA	Xie, Guoxin,Liu, Shuhai,Guo, Dan,Wang, Quan,&Luo, Jianbin.(2010).Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture..
MLA	Xie, Guoxin,et al."Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture".(2010).

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