QQ客服 官方微博 反馈留言

	Temperature control system for high temperature oxidation diffusion furnace
	Yang Yibo ; Yin Wensheng ; Wang Chunhong ; Zhu Yu ; Zhang Mingchao
	2010-10-12 ; 2010-10-12
关键词	Practical/ furnaces oxidation temperature control three-term control/ temperature control system high temperature oxidation diffusion furnace hardware system software system multichannel switch industrial computer temperature transmitter I/O cards PID tuning algorithm trajectory planning algorithm automatic temperature distribution/ B0170S Control equipment and processes in production engineering C3120N Thermal variables control E1550 Control technology and theory E1560 Production equipment
中文摘要	A hardware and software system for a high temperature oxidation diffusion furnace based on the technical demand was introduced. The hardware system was composed by a multi- channel switch, an industrial computer, a temperature transmitter, and I/O cards. Based on this hardware system the algorithm of the PID tuning was improved, and the trajectory planning algorithm was introduced. Finally, this system functions were fulfilled of the control, ramp, PID auto-tuning and automatic temperature distribution. The experiments show that this system achieves the technical requirement for oxidation diffusion and the system augment ability, stability and precision are improved. This system is already applied in high temperature oxidation diffusion furnace.
语种	中文
出版者	Editorial Board of Semiconductor Technology ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80127]
专题	清华大学
推荐引用方式 GB/T 7714	Yang Yibo,Yin Wensheng,Wang Chunhong,et al. Temperature control system for high temperature oxidation diffusion furnace[J],2010, 2010.
APA	Yang Yibo,Yin Wensheng,Wang Chunhong,Zhu Yu,&Zhang Mingchao.(2010).Temperature control system for high temperature oxidation diffusion furnace..
MLA	Yang Yibo,et al."Temperature control system for high temperature oxidation diffusion furnace".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。