Surface morphology and properties of zirconia thin films prepared at different deposition rates

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Surface morphology and properties of zirconia thin films prepared at different deposition rates
	Zhang DP ; Qi HJ ; Shao SY(邵淑英) ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	surf. eng.
	2006
卷号	22 期号:2 页码:157
关键词	ZrO2 films deposition rate XRD inhomogeneity
ISSN号	0267-0844
中文摘要	zro2 thin films were prepared on bk7 glass substrates by electron beam evaporation deposition method. the influence of deposition rate varying from 1.2 to 6.3 nm s(-1) on surface morphology and other properties of zro2 films were examined. with increasing deposition rate, the surface defect density increased. the decrease in half width at full maximum in x-ray diffraction pattern with deposition rate indicates an increase in crystal dimension with increasing deposition rate. electron beam deposited zro2 films are known to be inhomogeneous. from the change of the peak transmittance value, it can be deduced that the inhomogeneity of zro2 films strengthened gradually with increasing deposition rate. the type of surface defects changed from nodules to craters when the deposition rate was high enough.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000237223700012
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4274]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Zhang DP,Qi HJ,Shao SY,et al. Surface morphology and properties of zirconia thin films prepared at different deposition rates[J]. surf. eng.,2006,22(2):157, 160.
APA	Zhang DP,Qi HJ,邵淑英,贺洪波,邵建达,&范正修.(2006).Surface morphology and properties of zirconia thin films prepared at different deposition rates.surf. eng.,22(2),157.
MLA	Zhang DP,et al."Surface morphology and properties of zirconia thin films prepared at different deposition rates".surf. eng. 22.2(2006):157.