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	Precision stage motion controller based on a vibration model
	Ye Peiqing ; Yang Kaiming ; Yin Wensheng
	2010-05-10 ; 2010-05-10
关键词	Practical Theoretical or Mathematical/ acceleration control control system synthesis motion control pole assignment precision engineering three-term control vibrations/ precision stage motion controller vibration model high acceleration movements mechanical resonance tracking accuracy reduction pole assignment PID controller design acceleration feedforward control/ C1310 Control system analysis and synthesis methods C3120C Spatial variables control C3120E Velocity, acceleration and rotation control E2200 Mechanical components, systems and devices E1550 Control technology and theory E2100 General mechanics
中文摘要	High acceleration movements of a precision stage result in reaction forces that lead to mechanical resonance in the stage, which reduces the tracking accuracy and lengthens the positioning time. A simple controller architecture was developed to reduce the mechanical resonance based on a vibration model of the stage with the pole assignment and the model parameter matching methods used to design a PID controller. Tests showed that the tracking accuracy of the controller was 2 mu m better than a normal PID controller with acceleration feedforward control at a uniform speed of 200 mm/s and at an acceleration of 1 g, while the positioning time was reduced by 10 ms. The results show that the vibration model-based PID motion controller has much better dynamic response and tracking performance.
语种	中文 ; 中文
出版者	Tsinghua Univ. Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24772]
专题	清华大学
推荐引用方式 GB/T 7714	Ye Peiqing,Yang Kaiming,Yin Wensheng. Precision stage motion controller based on a vibration model[J],2010, 2010.
APA	Ye Peiqing,Yang Kaiming,&Yin Wensheng.(2010).Precision stage motion controller based on a vibration model..
MLA	Ye Peiqing,et al."Precision stage motion controller based on a vibration model".(2010).

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