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	Micromachined gas inertial sensor based on convection heat transfer
	Rong Zhu ; Henggao Ding ; Yan Su ; Zhaoying Zhou
	2010-05-10 ; 2010-05-10
关键词	Practical Experimental/ accelerometers convection gas sensors micromachining microsensors silicon/ micromachined gas inertial sensor convection heat transfer silicon etched cavity suspended central heater suspended thermistor wires hermetic chamber thermal accelerometers dual-axis accelerometer single-axis gyroscope Si/ A8280T Chemical sensors A0710C Micromechanical devices and systems A4725Q Convection and heat transfer B7230L Chemical sensors B7230M Microsensors B2575F Fabrication of micromechanical devices/ Si/int Si/el
中文摘要	A micromachined gas inertial sensor based on the principle of convection heat transfer is presented in the paper. The configuration of the sensor consists of a small silicon etched cavity, a suspended central heater and four suspended thermistor wires, all of which are assembled and packaged in a hermetic chamber. The sensor has similar configuration with known thermal accelerometers, but is different and novel because it is not only as a dual-axis accelerometer but also as a single-axis gyroscope. Numerical simulations and primary experiments are performed to validate the effectiveness of the sensor. [All rights reserved Elsevier].
语种	英语 ; 英语
出版者	Elsevier ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24682]
专题	清华大学
推荐引用方式 GB/T 7714	Rong Zhu,Henggao Ding,Yan Su,et al. Micromachined gas inertial sensor based on convection heat transfer[J],2010, 2010.
APA	Rong Zhu,Henggao Ding,Yan Su,&Zhaoying Zhou.(2010).Micromachined gas inertial sensor based on convection heat transfer..
MLA	Rong Zhu,et al."Micromachined gas inertial sensor based on convection heat transfer".(2010).

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