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	Control of deposition channels in nanosphere templates for high-density nanodot array production
	Wu, PW ; Peng, LQ ; Tuo, XL ; Wang, XG ; Yuan, J
	2010-05-10 ; 2010-05-10
关键词	PERIODIC NANOPILLAR ARRAYS NATURAL LITHOGRAPHY FABRICATION POLYSTYRENE SURFACES NANOSTRUCTURE PLASMA Engineering, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied
中文摘要	The deformation of 'soft' polystyrene spheres is found to limit the usefulness of nanosphere lithography in high-density applications because of the eventual closure of the void areas between the self-assembled nanospheres which function as channels for material deposition. We have used a plasma etching technique to reopen and enlarge these channels in the template in a controlled manner. This enables the controlled fabrication of a range of nanoarrays of very high density and variable sizes. The resulting shape of the nanodots produced can be understood by considering the etching-induced surface diffusion of the polystyrene in the plasma treatment.
语种	英语 ; 英语
出版者	IOP PUBLISHING LTD ; BRISTOL ; DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20851]
专题	清华大学
推荐引用方式 GB/T 7714	Wu, PW,Peng, LQ,Tuo, XL,et al. Control of deposition channels in nanosphere templates for high-density nanodot array production[J],2010, 2010.
APA	Wu, PW,Peng, LQ,Tuo, XL,Wang, XG,&Yuan, J.(2010).Control of deposition channels in nanosphere templates for high-density nanodot array production..
MLA	Wu, PW,et al."Control of deposition channels in nanosphere templates for high-density nanodot array production".(2010).

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