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	Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles
	Peng, KQ ; Hu, JJ ; Yan, YJ ; Wu, Y ; Fang, H ; Xu, Y ; Lee, ST ; Zhu, J
	2010-05-10 ; 2010-05-10
关键词	HYDROFLUORIC-ACID SOLUTION POROUS SILICON ELECTROLESS DEPOSITION ELECTROCHEMICAL PROPERTIES SEMICONDUCTOR NANOWIRES QUANTUM CONFINEMENT OPTICAL-PROPERTIES FLUORIDE SOLUTIONS COPPER DEPOSITION CONTROLLED GROWTH Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter
中文摘要	A novel strategy for preparing large-area, oriented silicon nanowire (SiNW) arrays on silicon substrates at near room temperature by localized chemical etching is presented. The strategy is based on metal-induced (either by Ag or Au) excessive local oxidation and dissolution of a silicon substrate in an aqueous fluoride solution. The density and size of the as-prepared SiNW's depend on the distribution of the patterned metal particles on the silicon surface. High-density metal particles facilitate the formation of silicon nanowires. Well-separated, straight nanoholes are dug along the Si block when metal particles are well dispersed with a large space between them. The etching technique is weakly dependent on the orientation and doping type of the silicon wafer. Therefore, SiNWs with desired axial crystallographic orientations and doping characteristics are readily obtained. Detailed scanning electron microscopy observations reveal the formation process of the silicon nanowires, and a reasonable mechanism is proposed on the basis of the electrochemistry of silicon and the experimental results.
语种	英语 ; 英语
出版者	WILEY-V C H VERLAG GMBH ; WEINHEIM ; PO BOX 10 11 61, D-69451 WEINHEIM, GERMANY
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20372]
专题	清华大学
推荐引用方式 GB/T 7714	Peng, KQ,Hu, JJ,Yan, YJ,et al. Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles[J],2010, 2010.
APA	Peng, KQ.,Hu, JJ.,Yan, YJ.,Wu, Y.,Fang, H.,...&Zhu, J.(2010).Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles..
MLA	Peng, KQ,et al."Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles".(2010).

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