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	High pressure on asperity surface caused by nano particles' behavior in non-Newtonian slurries
	Chen, H. S. ; Chen, D. R. ; Li, J.
	2010-05-10 ; 2010-05-10
会议名称	Nanoscience and Technology, Pts 1 and 2 ; China International Conference on Nanoscience and Technology (ChinaNANO 2005) ; Beijing, PEOPLES R CHINA ; Web of Science
关键词	nano particle non-Newtonian fluid chemical mechanical polishing rheology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter
中文摘要	Particle's behavior in the slurry with power-law viscosity shows great effect on the wafer surface polishing. Hydrodynamic pressure is periodically generated on the surface asperity when particles are passing through it. Fatigue fracture occurs under the effect of periodical pressure and it begins from the top to the bottom of the asperity. Based on the energy-balance fracture theory, the removal rate is calculated and it shows good agreement with experiment data.
会议录出版者	TRANS TECH PUBLICATIONS LTD ; STAFA-ZURICH ; LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19314]
专题	清华大学
推荐引用方式 GB/T 7714	Chen, H. S.,Chen, D. R.,Li, J.. High pressure on asperity surface caused by nano particles' behavior in non-Newtonian slurries[C]. 见:Nanoscience and Technology, Pts 1 and 2, China International Conference on Nanoscience and Technology (ChinaNANO 2005), Beijing, PEOPLES R CHINA, Web of Science.

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