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	The mechanical study on a closed and V style MEMS planar microspring
	Li, Hua ; Shi, Gengchen
	2010-05-10 ; 2010-05-10
会议名称	PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2007, VOLS 1 AND 2 ; International Conference on Mechanical Engineering and Mechanics ; Wuxi, PEOPLES R CHINA ; Web of Science
关键词	V style microspring Castigliano's second theorem spring constant Automation & Control Systems Engineering, Mechanical Mechanics
中文摘要	The V style MEMS microspring is a wholly closed microspring. To analyze its stiffness, the mathematics formula about the relationship between the stiffness and parameters of microspring should be presented. The mechanics model of the V style planar microspring was established in the paper. The calculation formula of spring constant about V style microspring in the linear range was derived by the Castigliano's second theorem of energy method and the deformation in the linear was simulated by Finite Element Analysis (FEA) ANSYS software. The simulation results are tally with the formula results in the linear range but not in the nonlinear range. Adopting deep Ultraviolet lithography of SU-8 photoresist to replace the expensive synchrotron radiation lithography of LIGA technology, the nickel standard sample and V style nickel microspring which included four atomic-elements were produced. Then the stress-strain curve and the force-displacement curve were gained. In the linear range, the experiment data are tally with the formula results, which shows the correctness of the formula and the theory analysis.
会议录出版者	SCIENCE PRESS USA INC ; MONMOUTH JUNCTION, ; 2031 US HWY 130, SUITE F, MONMOUTH JUNCTION,, NJ 08852 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19154]
专题	清华大学
推荐引用方式 GB/T 7714	Li, Hua,Shi, Gengchen. The mechanical study on a closed and V style MEMS planar microspring[C]. 见:PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2007, VOLS 1 AND 2, International Conference on Mechanical Engineering and Mechanics, Wuxi, PEOPLES R CHINA, Web of Science.

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