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	Effect of annealing temperature on properties of sputtered PZT thin films
	Yi-Ping Zhu ; Tian-Ling Ren ; Ning-Xin Zhang ; Li-Tian Liu ; Zhi-Jian Li
	2010-05-07 ; 2010-05-07
关键词	Experimental/ annealing crystal orientation crystallisation densification ferroelectric thin films ferroelectricity lead compounds sputter deposition/ annealing PZT thin films morphotropic phase boundary region rapid thermal process sputtering densification crystallization crystal orientations crystalline structure ferroelectric properties dielectric properties 650 degC Pb(ZrTi)O/sub 3/ Pt-Ti-SiO/sub 2/-Si/ A7755 Dielectric thin films A6855 Thin film growth, structure, and epitaxy A8115C Deposition by sputtering A7780 Ferroelectricity and antiferroelectricity A8140G Other heat and thermomechanical treatments A6470K Solid-solid transitions A6150J Crystal morphology and orientation B2810F Piezoelectric and ferroelectric materials B0520B Sputter deposition/ temperature 9.23E+02 K/ PbZrTiO3/ss TiO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss PtTiSiO2Si/sur SiO2/sur O2/sur Pt/sur Si/sur Ti/sur O/sur PtTiSiO2Si/ss SiO2/ss O2/ss Pt/ss Si/ss Ti/ss O/ss
中文摘要	Lead zirconate titanate (PZT) thin films with a composition near the morphotropic phase boundary region were fabricated on the Pt(111)/Ti/SiO/sub 2//Si(100) multilayer substrate using sputtering method. An additional annealing treatment was carried out for one minute using a rapid thermal process (RTP) in oxygen atmosphere to improve densification and crystallization. The annealing temperature effects on crystal orientations and electric properties of PZT thin films were investigated. It has been found that the PZT thin film annealed at 650 degrees C shows the best crystalline structure and has the best dielectric and ferroelectric properties.
语种	英语 ; 英语
出版者	Gordon & Breach ; Netherlands
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16669]
专题	清华大学
推荐引用方式 GB/T 7714	Yi-Ping Zhu,Tian-Ling Ren,Ning-Xin Zhang,et al. Effect of annealing temperature on properties of sputtered PZT thin films[J],2010, 2010.
APA	Yi-Ping Zhu,Tian-Ling Ren,Ning-Xin Zhang,Li-Tian Liu,&Zhi-Jian Li.(2010).Effect of annealing temperature on properties of sputtered PZT thin films..
MLA	Yi-Ping Zhu,et al."Effect of annealing temperature on properties of sputtered PZT thin films".(2010).

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