On-chip integrated inductors with ferrite thin films for RFIC | |
Yang Chen ; Liu Feng ; Ren Tian-Ling ; Liu Li-tian | |
2010-05-07 ; 2010-05-07 | |
关键词 | Practical/ cobalt compounds equivalent circuits ferrite devices magnetic thin film devices magnetic thin films monolithic integrated circuits nickel compounds radiofrequency integrated circuits spin coating thin film inductors yttrium compounds/ on-chip integrated inductors RFIC ferrite thin films radiofrequency integrated circuits spin coating equivalent circuits NiZnCuFeO YBiFeO Co/sub 7/ZrO/sub 9// B1350H Microwave integrated circuits B2140 Inductors and transformers B3110E Ferrites and garnets B2570 Semiconductor integrated circuits B3120N Magnetic thin film devices/ NiZnCuFeO/int Cu/int Fe/int Ni/int Zn/int O/int NiZnCuFeO/ss Cu/ss Fe/ss Ni/ss Zn/ss O/ss YBiFeO/int Bi/int Fe/int O/int Y/int YBiFeO/ss Bi/ss Fe/ss O/ss Y/ss Co7ZrO9/int Co7/int Co/int O9/int Zr/int O/int Co7ZrO9/ss Co7/ss Co/ss O9/ss Zr/ss O/ss |
中文摘要 | On-chip RF integrated inductors with kinds of ferrite: thin-films (Ni/sub 0.4/Zn/sub 0.4/Cu/sub 0.2/Fe/sub 2/O/sub 4 /, Y/sub 2.8/Bi/sub 0.2/Fe/sub 5/O/sub 12/ and Co/sub 7/ZrO/sub 9/) have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance, significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RFIC. |
语种 | 中文 ; 中文 |
出版者 | Southeast Univ ; China |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/16540] ![]() |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Yang Chen,Liu Feng,Ren Tian-Ling,et al. On-chip integrated inductors with ferrite thin films for RFIC[J],2010, 2010. |
APA | Yang Chen,Liu Feng,Ren Tian-Ling,&Liu Li-tian.(2010).On-chip integrated inductors with ferrite thin films for RFIC.. |
MLA | Yang Chen,et al."On-chip integrated inductors with ferrite thin films for RFIC".(2010). |
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