Meter-scale thin film coating equipment based on meniscus-coating technology | |
Xu, Jia1; Xu, Wen-Bin1; Bu, He-Yang1; Lu, Zheng-Wu1; Liu, Zheng-Kun2; Hong, Yi-Lin2; Yu, Wei-Xing3![]() | |
刊名 | guangxue jingmi gongcheng/optics and precision engineering
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2017 | |
卷号 | 25期号:1页码:133-140 |
ISSN号 | 1004924x |
其他题名 | 米级弯月面化学薄膜涂覆装备的研制 |
通讯作者 | yu, wei-xing (yuwx@opt.ac.cn) |
产权排序 | 3 |
英文摘要 | the meniscus chemical coating technology becomes a very promising new chemical thin-film coating technology after traditional coating technologies such as spin-coating and spray coating due to its merits of large area, low-cost and high efficiency. to meet the requirements of one national major projects on the meter-scale chemical thin film coating of optical component surface, based on the systematical research of the meniscus chemical film coating principal, static and dynamic gluing experiments were respectively conducted, and the relationships among the gluing pressure, the gap between substrate and slit, the material hydrophobicity and the morphology of meniscus were analyzed, then the fine tuning of the meniscus could be achieved and equipment based on the meniscus chemical thin film coating technology was developed. the coating uniformity of photo-resist was realized using this equipment on the glass substrate sizing 1400 mm×420 mm, making overall coating thickness error less than 4% and satisfying coating requirements of meter-scale chemical precision thin film coating of optical component surface. © 2017, science press. all right reserved. |
收录类别 | EI ; CSCD |
语种 | 中文 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/28929] ![]() |
专题 | 西安光学精密机械研究所_光学影像学习与分析中心 |
作者单位 | 1.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun; 130033, China 2.University of Science and Technology of China, Hefei; 230026, China 3.Key Laboratory of Spectral Imaging Technology of CAS, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Changchun; 710119, China |
推荐引用方式 GB/T 7714 | Xu, Jia,Xu, Wen-Bin,Bu, He-Yang,et al. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. guangxue jingmi gongcheng/optics and precision engineering,2017,25(1):133-140. |
APA | Xu, Jia.,Xu, Wen-Bin.,Bu, He-Yang.,Lu, Zheng-Wu.,Liu, Zheng-Kun.,...&Yu, Wei-Xing.(2017).Meter-scale thin film coating equipment based on meniscus-coating technology.guangxue jingmi gongcheng/optics and precision engineering,25(1),133-140. |
MLA | Xu, Jia,et al."Meter-scale thin film coating equipment based on meniscus-coating technology".guangxue jingmi gongcheng/optics and precision engineering 25.1(2017):133-140. |
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