Full-field x ray nano-imaging system designed and constructed at SSRF

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	Full-field x ray nano-imaging system designed and constructed at SSRF
	Feng, BG; Deng, B; Ren, YQ; Wang, YD; Du, GH; Tan, H; Xue, YL; Xiao, TQ
刊名	CHINESE OPTICS LETTERS
	2016
卷号	14 期号:9 页码:-
ISSN号	1671-7694
通讯作者	Deng, B (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China.
英文摘要	Full-field x ray nano-imaging (FXNI) is one of the most powerful tools for in-situ, non-destructive observation of the inner structure of samples at the nanoscale. Owing to the high flux density of the third-generation synchrotron radiation facility, great progress is achieved for FXNI and its applications. Up to now, a spatial resolution of 20 nm for FXNI is achieved. Based on the user operation experiences over the years at the Shanghai Synchrotron Radiation Facility (SSRF) x ray imaging beamline, we know lots of user experiments will rely on a large range of spatial resolutions and fields of view (FOVs). In particular, x ray microscopes with a large FOV and a moderate spatial resolution of around 100 nm have a wide range of applications in many research fields. Driven by user requirements, a dedicated FXNI system is designed and constructed at the SSRF. This microscope is based on a beam shaper and a zone plate, with the optimized working energy range set to 8-10 keV. The experimental test results by a Siemens star pattern demonstrate that a spatial resolution of 100 nm is achieved, while an FOV of 50 mu m is obtained.
收录类别	SCI
语种	英语
WOS记录号	WOS:000384516200018
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/26518]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
推荐引用方式 GB/T 7714	Feng, BG,Deng, B,Ren, YQ,et al. Full-field x ray nano-imaging system designed and constructed at SSRF[J]. CHINESE OPTICS LETTERS,2016,14(9):-.
APA	Feng, BG.,Deng, B.,Ren, YQ.,Wang, YD.,Du, GH.,...&Xiao, TQ.(2016).Full-field x ray nano-imaging system designed and constructed at SSRF.CHINESE OPTICS LETTERS,14(9),-.
MLA	Feng, BG,et al."Full-field x ray nano-imaging system designed and constructed at SSRF".CHINESE OPTICS LETTERS 14.9(2016):-.