Growth control of RF magnetron sputtered SrRuO3 thin films through the thickness of LaNiO3 seed layers

CORC > 上海硅酸盐研究所 > 中国科学院上海硅酸盐研究所 > 无机功能材料与器件重点实验室 > 期刊论文

	Growth control of RF magnetron sputtered SrRuO3 thin films through the thickness of LaNiO3 seed layers
	Zhu, Mingkang 1,2; Dong, Xianlin 2; Chen, Ying 2; Xue, Fen 2; Lian, Jianyun 2; Xiao, Ling 2; Ding, Guoji 1; Wang, Genshui 2
刊名	CERAMICS INTERNATIONAL
	2016-09-01
卷号	42 期号:12 页码:13925-13931
关键词	SrRuO3 Thin films Orientation control Surface morphology Magnetic properties Electrical transport properties
英文摘要	SrRuO3 (SRO) thin films were grown on SiO2/Si substrates with different thickness of LaNiO3 (LNO) seed layers by RF magnetron sputtering. Effects of LNO thickness on the grain orientation, surface morphology, magnetic behavior and electrical transport properties of SRO films were investigated. The orientation of SRO films transformed from (110)(pc) to (001)(pc) and the residual stress was released gradually with increasing the thickness (pc refers to the pseudo-cubic unit cell of SrRuO3). SRO films with higher orientation grown on LNO exhibited more flat surface, higher saturation magnetization, and lower coercive field. The magnetic anisotropy was enhanced on thicker LNO due to the different states of residual stress. In addition, the temperature dependence of resistivity was promoted by the microstructural disorder. (110)(pc)-oriented SRO monolayer electrode and (001)(pc)-oriented SRO/LNO300 bilayer electrode own low room temperature sheet resistance of 0.38 Omega/square and 0.26 Omega/square, respectively. The results indicate that the controllable SRO films can be used as not only good bottom electrodes but also promising templates to control the crystallographic orientations of various other perovskite-based functional materials. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Materials Science, Ceramics
研究领域[WOS]	Materials Science
关键词[WOS]	SUBSTRATE
收录类别	SCI
语种	英语
WOS记录号	WOS:000380081900076
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/22920]
专题	上海硅酸盐研究所_无机功能材料与器件重点实验室_期刊论文
作者单位	1.Shanghai Univ, Coll Environm & Chem Engn, 99 Shangda Rd, Shanghai 200444, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, 1295 Dingxi Rd, Shanghai 200050, Peoples R China
推荐引用方式 GB/T 7714	Zhu, Mingkang,Dong, Xianlin,Chen, Ying,et al. Growth control of RF magnetron sputtered SrRuO3 thin films through the thickness of LaNiO3 seed layers[J]. CERAMICS INTERNATIONAL,2016,42(12):13925-13931.
APA	Zhu, Mingkang.,Dong, Xianlin.,Chen, Ying.,Xue, Fen.,Lian, Jianyun.,...&Wang, Genshui.(2016).Growth control of RF magnetron sputtered SrRuO3 thin films through the thickness of LaNiO3 seed layers.CERAMICS INTERNATIONAL,42(12),13925-13931.
MLA	Zhu, Mingkang,et al."Growth control of RF magnetron sputtered SrRuO3 thin films through the thickness of LaNiO3 seed layers".CERAMICS INTERNATIONAL 42.12(2016):13925-13931.