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	Friction and Wear Property of Amorphous Carbon Films Prepared by Ion Beam Assisted Deposition
	rong sun ; shuhui yu ; ruxu du ; qunji xue
	2008
会议名称	5th China International Symposium on Tribology/1st International Tribology Symposium of IFToMM
英文摘要	Ion-beam assisted deposition method (IBAD) has become popular in the synthesis of many thin-film materials with distinguished properties. In comparison with plasma techniques, IBAD is a method which allows us to control more independently many essential deposition parameters (e.g. atom flux, ion energy, and ion incidence angle). Therefore, IBAD is a proper method for a fundamental study of the influence of these parameters on depositionprocesses and properties of their products[1-4]. In this study, amorphous carbon (a-C) films with a thickness of 100 nm were deposited on a single-crystal silicon (Si100) substrate by vacuum vapor deposition system using IBAD(Fig 1) with different Ar ion assisted bombardment energy (0eV; 150eV; 300eV; 450eV; 600eV; 750eV). The micro-structure (Table 1), micro-mechanical properties (Table 3), surface morphology (Fig 2), adhesion strengths (Fig 3) and friction behavior (Fig 4), of the a-C films were examined making use of atomic force microscopy (AFM), ball-on-disk reciprocating friction tester and nano-indentation system. The Raman spectra of the a-C films were recorded on a Jobin Yvon T64000 spectrometer operating with a 514.5 nm Ar laser as the excitation source (Table 1). The internal stress of the a-C films were calculated from the Stoney equation (Table 2). The results show that the anti-wear life and adhesion of the a-C films on the Si substrates were significantly increased by the assisting of low-energy-argon-ion beam and substrate temperature. The energy of the argon-ion beam and the value of internal stress play the key role in the increase of adhesion strength and the anti-wear life of the amorphous carbon film. The friction and wear mechanism of the amorphous carbon film under dry friction condition was also discussed.
收录类别	ISTP
语种	英语
内容类型	会议论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/2218]
专题	深圳先进技术研究院_集成所
推荐引用方式 GB/T 7714	rong sun,shuhui yu,ruxu du,et al. Friction and Wear Property of Amorphous Carbon Films Prepared by Ion Beam Assisted Deposition[C]. 见:5th China International Symposium on Tribology/1st International Tribology Symposium of IFToMM.

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