A comparison study of two different methods to synthesize magnetic slurry for the fabrication of magnetic films
Xu Zheng ; Rong Sun ; Shuhui Yu ; Lei Li ; Mian Huang ; Guangfu Yin ; Ruxu Du ; Lixi Wan
2008
会议名称Proceedings, 2008 International Conference on Electronic Packaging Technology and High Density Packaging, ICEPT-HDP 2008
英文摘要A new spiral thin-film inductor structure is designed, in which the insulating magnetic thin film takes the places of both the insulating layer and themagnetic layer in the traditional structure. For the fabrication of the insulating magnetic film, a magnetic slurry which is a soft magneticcomposite composed of organic polymer and nano Fe3O4 particles was synthesized. The magnetic slurry was synthesized by chemical co-precipitation method and microemulsions, respectively. Fe3O4 particles with a grain size of 20nm tends to agglomerate and is constrained by thenetwork of silicon gel in the first slurry prepared via co-precipitation. While in the microemulsions, water-soluble organic material disperses thenanoFe 3O4 whose size lays in the range of 6-15nm. The two kinds of magnetic slurries have different magnetic susceptibilities, which is 110cm3/mol, and 344cm3/mol, respectively. The surface of the film fabricated with the microemulsions slurry is smooth. In contrast, there are a lot of flaws for the film derived from the co-precipitated slurry. Therefore, the microemulsions method is more suitable to synthesize magneticslurry for the fabrication of magnetic film.
收录类别EI
语种英语
内容类型会议论文
源URL[http://ir.siat.ac.cn:8080/handle/172644/2215]  
专题深圳先进技术研究院_集成所
推荐引用方式
GB/T 7714
Xu Zheng,Rong Sun,Shuhui Yu,et al. A comparison study of two different methods to synthesize magnetic slurry for the fabrication of magnetic films[C]. 见:Proceedings, 2008 International Conference on Electronic Packaging Technology and High Density Packaging, ICEPT-HDP 2008.
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