Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study | |
Liu, Minzhe1,2; Li, Hefu1; Yu, Weixing3; Wang, Taisheng1; Liu, Zhenyu1; Desmulliez, Marc. P. Y.4 | |
刊名 | rsc advances |
2016 | |
卷号 | 6期号:113页码:112300-112306 |
关键词 | Computer software Dielectric materials Electrodes Electrohydrodynamics Film thickness Polymer films Semiconducting films |
ISSN号 | 2046-2069 |
通讯作者 | yu, w. (yuwx@opt.ac.cn) |
产权排序 | 3 |
英文摘要 | this article studies the effect that different types of patterned electrodes have on the electrohydrodynamic instability patterning (ehdip) process for the faithful replication of micro-and nanostructures. two types of patterned electrodes are studied. one is fully conductive, i.e. both pattern and substrate are conductive. the other type has conductive microstructures fabricated on a dielectric substrate. by employing the comsol (tm) multiphysics software package, a rigorous numerical simulation of the ehdip process has been carried out for both types of electrodes. the simulation results show that both electrodes can realize a faithful replication of the micro-and nanostructures once the variable, delta e/delta x, reaches the critical value. moreover, it is demonstrated that a fully conductive template is preferred if a small polymer film thickness is employed; a partially conductive electrode is preferred for larger film thickness. these results provide guidelines for the better control of the ehdip process in order to realize the perfect pattern replication of structures for a variety of applications in mems or micro/nanofluidics. |
学科主题 | dielectric materials ; semiconducting materials ; computer software, data handling and applications ; nanotechnology ; polymeric materials ; solid state physics |
WOS标题词 | science & technology ; physical sciences |
类目[WOS] | chemistry, multidisciplinary |
研究领域[WOS] | chemistry |
关键词[WOS] | thin polymer-films ; liquid-films ; field ; interface ; lithography ; simulation ; arrays |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000389708700075 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/28517] |
专题 | 西安光学精密机械研究所_光学影像学习与分析中心 |
作者单位 | 1.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, 3888 Dongnanhu Rd, Changchun, Jilin, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Spectral Imaging Technol, 17 Xinxi Rd, Xian 710119, Peoples R China 4.Heriot Watt Univ, Sch Engn & Phys Sci, MIcroSyst Engn Ctr MISEC, Edinburgh EH14 4AS, Midlothian, Scotland |
推荐引用方式 GB/T 7714 | Liu, Minzhe,Li, Hefu,Yu, Weixing,et al. Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study[J]. rsc advances,2016,6(113):112300-112306. |
APA | Liu, Minzhe,Li, Hefu,Yu, Weixing,Wang, Taisheng,Liu, Zhenyu,&Desmulliez, Marc. P. Y..(2016).Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study.rsc advances,6(113),112300-112306. |
MLA | Liu, Minzhe,et al."Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study".rsc advances 6.113(2016):112300-112306. |
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