QQ客服 官方微博 反馈留言

题名	二倍频薄膜的损伤性能研究
作者	刘杰
学位类别	硕士
答辩日期	2014
授予单位	中国科学院上海光学精密机械研究所
导师	张伟丽
关键词	薄膜 二倍频 激光损伤
其他题名	Laser-induced Damage Performance of Second Harmonic Thin Film
中文摘要	二倍频薄膜是高功率激光装置尤其是超短超快激光系统中的重要光学元件，提高二倍频薄膜的激光损伤阈值，是目前超短超快激光系统设计和工程中急迫需要解决的重要问题之一。本文以提高二倍频薄膜的损伤阈值为宗旨，针对影响薄膜损伤阈值的因素研究了光学薄膜在532nm激光作用下的损伤性能。主要内容如下: 在具有较高损伤阈值的反射膜上制备单层膜，能够在一定程度上隔离基底与薄膜的耦合效应对单层膜损伤性能的影响，对比分析了不同材料单层膜的抗激光损伤性能。 分别研究了基底处理方式对高反膜损伤阈值的影响以及基底温度、工作气压和外保护层对HfO2/SiO2高反膜的光学性质、化学计量比和激光损伤阈值的影响。研究结果表明沉积工艺和外保护层对薄膜的损伤性能影响很大。详细分析了高反膜在532nm激光作用下的损伤形貌特征。 采用单台阶能量光栅扫描以及R-on-1测试方法研究了HfO2/SiO2高反膜的二倍频激光预处理效应。实验结果表明，二倍频激光预处理能够去除薄膜中低阈值的缺陷，从而在一定程度上增强薄膜的抗激光损伤能力。 制备了Al2O3/SiO2/HfO2/SiO2和Y2O3/SiO2/HfO2/ SiO2组合高反膜，并与常规HfO2/SiO2高反膜的光学性质、损伤阈值、损伤形貌及深度进行了对比分析。损伤阈值测试结果表明，Al2O3/SiO2/HfO2/SiO2组合高反膜能够获得比常规HfO2/SiO2高反膜更高的损伤阈值。 研究了基底清洗方式（包括超声清洗、酸洗和离子束清洗）对增透膜和分光膜损伤性能的影响。研究结果表明，基底酸洗后的薄膜损伤阈值相对于基底超声清洗的薄膜有较大幅度的提升。损伤形貌分析结果表明，酸洗有利于基底亚表面缺陷的去除，提高基底质量，从而提高增透膜和分光膜的损伤阈值。此外，离子束刻蚀清洗基底也是一种有效提高Ta2O5/SiO2分光膜抗激光损伤能力的方法。
英文摘要	Second harmonic thin films are essential optical components in high power laser equipment, especially ultrashort and ultrafast laser system. It is one of the most important issues to increase the laser-induced damage threshold (LIDT) of second harmonic thin films in the design and engineering of ultrashort and ultrafast laser system at present. In order to improve the LIDT of second harmonic thin films, the damage performance of optical thin films under irradiation of 532 nm laser was investigated aiming at the factors that affect the LIDT of thin films. The main contents are as follows. Monolayer coatings were prepared on reflectors with relatively high LIDT at 532 nm, which can eliminate the influence of coupling effect between substrate and coating to a certain degree. The laser resistant ability of different monolayer coatings was compared. The impact of substrate cleaning method on the LIDT of HR coatings was also studied. Meanwhile, the influence of substrate temperature, deposited pressure and overcoat on the optical constants, chemical composite, and LIDT of HfO2/SiO2 high-reflective (HR) coatings were also studied. Results showed that deposition parameters and overcoat played an important role in the damage performance of HR coatings. Besides, the damage morphology and damage depth of HR coatings were characterized and analyzed in detail. N% raster scanning and R-on-1 test were conducted to investigate the laser conditioning effect of HfO2/SiO2 HR coatings. Experiment results showed that laser conditioning could eliminate the defects with low threshold in coatings, thus improving the LIDT of 532nm HR coatings. Al2O3/SiO2/HfO2/SiO2 and Y2O3/SiO2/HfO2/SiO2 double stack HR coatings at 532 nm were designed and fabricated. Optical properties, LIDT, damage morphologies and damage depth of two double stack HR coatings were compared with conventional HfO2/SiO2 HR coatings. The LIDT of three kinds of high reflectors was tested, showing that the laser damage resistance of Al2O3/SiO2/HfO2/SiO2 double stack HR coatings was better than that of the conventional HfO2/SiO2 HR coatings. The impact of substrate cleaning methods (including ultrasonic cleaning, acid cleaning, and ion beam cleaning) on the anti-reflectors and splitters was researched. Results showed that the LIDT of coatings was increased by a large extent when the substrate was acid cleaning. It was found from the damage characteristics that acid cleaning was beneficial to eliminate the influence of subsurface defects to coatings, and then the LIDT of anti-reflectors and splitters. In addition, ion beam cleaning of substrate was also an effective way to enhance laser damage resistant ability of Ta2O5/SiO2 splitters.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16860]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	刘杰. 二倍频薄膜的损伤性能研究[D]. 中国科学院上海光学精密机械研究所. 2014.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。