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题名	雕塑薄膜位相器件的制备及性能研究
作者	侯永强
学位类别	硕士
答辩日期	2013
授予单位	中国科学院上海光学精密机械研究所
导师	齐红基
关键词	雕塑薄膜 倾斜入射沉积 双折射 各向异性
其他题名	Preparation and Phase Shift Properties of Sculptured Anisotropic Thin Films
中文摘要	晶体的双折射特性源于晶体分子和晶胞的各向异性，事实上在一定尺度范围内具有各向异性微结构的薄膜也可以产生双折射现象。雕塑薄膜是一种新型的、具有各向异性微结构的纳米薄膜。通过控制薄膜的生长行为可以实现特定的光学性能，这对于偏振光学器件的发展有着潜在的重要研究和应用价值，特别是对提高光学系统的小型化、集成化有显著的促进作用。 本论文研究了雕塑薄膜的设计、制备及性能，特别是对双折射薄膜的相移特性进行了深入分析。通过对薄膜微结构的调控，实现对入射偏振光波相移的调制。基于双轴双折射薄膜模型，建立了多层雕塑薄膜光学性能（反射率、透过率、反射及透射相移）的计算分析程序；利用在不同入射角度下薄膜对两种偏振态光波的透射光谱获得了雕塑薄膜的结构参数（主轴折射率、薄膜厚度及柱状角）。在此基础上开展了双折射薄膜位相延迟片、正入射F-P窄带偏振分离薄膜滤光片的设计与制备工作，并研究了倾斜入射沉积雕塑薄膜的透射及反射相移特性。 采用倾斜入射沉积的电子束蒸发技术在室温下制备了TiO2单层倾斜柱状雕塑薄膜，并用分光光度计测量了双折射薄膜在 波长范围内不同入射角度下TE波和TM波的透过率光谱；利用模拟退火优化算法对薄膜两种偏振态光波的透射光谱进行拟合，得到了TiO2薄膜的三个主轴折射率n1、n2 和n3，薄膜厚度d及柱状角β，进而分析了双折射薄膜的结构参数和相移特性之间的关系。理论分析和实验结果都表明利用倾斜入射沉积技术制备的雕塑薄膜，其结构和光学性能稳定可控；同时，应用建立的优化分析程序可以准确提取出双折射薄膜的结构参数，这为基于雕塑薄膜位相器件的设计和制备奠定了材料基础。 通过在多层全介质F-P薄膜滤光片中引入各向异性薄膜作为间隔层，利用倾斜入射沉积柱状结构薄膜的双折射特性，实现了正入射条件下TE波和TM波的偏振分离，光谱测量曲线与理论设计结果吻合很好，从实验上验证了这种方法在制备正入射F-P偏振分离滤光片的可行性。在此基础上研究了双折射薄膜间隔层的结构参数对F-P偏振分离滤光片的透射光谱、位相延迟、带宽、中心波长及角谱特性的影响。双轴各向异性间隔层的引入为设计和制备全介质F-P窄带偏振分离薄膜滤光片提供了新的方法，且由于雕塑薄膜可提供更多调节参数，F-P偏振分离滤光片的光学性能可以灵活调节。 从理论上分析了双轴双折射薄膜的角谱选择特性，无论光轴的取向如何，当主截面与主平面重合时，沿薄膜界面法线两侧对称入射的光波具有相同的透射光谱，即双折射薄膜具有对称的角度选择光谱特性。利用倾斜入射沉积技术制备和研究了TiO2雕塑薄膜的微观形貌结构及薄膜在不同对称入射角度下异常光波的透射光谱，结果表明当光波对称倾斜入射时，薄膜的透射光谱重叠，从实验上验证了双折射薄膜的光谱具有角度对称性。
英文摘要	Crystal birefringence is derived from the anisotropy of crystalline molecules and its unit cell. Actually, the anisotropic microstructures of thin films also induce the optical anisotropy and birefringence. Sculptured thin films (STFs) are a novel kind of nanostructured films with anisotropic and unidirectionally varying optical properties that can be designed and realized in a controllable manner. In addition, the STFs exhibit continuum and anisotropic characteristics, but the molecules and clusters of small size retain their individuality, this property is very important to the development of polarizing components for the miniaturization of integrated optical systems. In this thesis, the optical properties of anisotropic thin film, especially the phase shift performances, were investigated with the characteristic matrix. With the biaxial birefringent thin film model, a software program was developed for analysis of optical performances varied with anisotropic microstructures of assembly birefringent layers, including the reflectance, transmittance, phase shift on reflection and/or transmission. On the basis of structural parameters of birefringent thin film determined from the transmittance spectra, the design and preparation of phase retardation plate and F-P narrowband polarizing filter at normal incidence were discussed. A slanted columnar TiO2 anisotropic thin film was prepared by reactive electron-beam evaporation with glancing angle deposition (GLAD) technique. The optical constants of TiO2 ATF, including the principal refractive indices n1, n2, n3, the coating physical thickness d and column angle β, were derived by fitting the transmittance spectra for TE and TM waves measured at normal and oblique incidence over with the simulated annealing algorithm. The phase shifts of polarized light after reflection and/or transmission were analyzed and the theoretical studies reasonably well agreed with experimental results measured with spectroscopic ellipsometry at different oblique angles. The results show that the structural parameters of birefringent thin film can be extracted from the transmittance spectra with our developed software package and perform better in manipulating the polarization state of electromagnetic waves. Birefringence of the ATF can provide a sophisticated phase modulation with varied layer thickness or incidence angle over a broad range to have a wide-angle phase shift. A novel F-P narrowband polarizing filter at normal incidence consisting of anisotropic space layer and symmetric isotropic HR mirrors was proposed and prepared. The optical properties of transmittance, phase shift, central wavelength, bandwidth and angular performances for TE and TM waves varied with the structural parameters of the anisotropic space layer were discussed. The calculated results well confirm that the spectral measurements. We verified the feasibility of achieving this high efficiency filter by applying birefringent thin film in the space layer and demonstrated that the polarization state of electromagnetic waves and phase shift can be better modulated because the anisotropic space layer presents birefringence. The symmetrical angular-selective transmittance performances of a biaxial anisotropic thin film were derived for the light incident at the same angle but coming from opposite sides of the surface normal. In order to verify the validity and generality of our theoretical derivation, a tilted columnar TiO2 biaxial anisotropic layer was prepared with GLAD technique. The results show that the experimental measured transmittance spectra for extraordinary wave almost overlap at the symmetrical oblique incidence angles, which validates the theoretical derivation.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16781]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	侯永强. 雕塑薄膜位相器件的制备及性能研究[D]. 中国科学院上海光学精密机械研究所. 2013.

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