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题名	大口径平面面形子孔径拼接干涉测量技术研究
作者	徐洋
学位类别	硕士
答辩日期	2012
授予单位	中国科学院上海光学精密机械研究所
导师	唐锋
关键词	干涉测量 光学检测 绝对检验 子孔径拼接
其他题名	Study on subaperture stitching interferometry for large optical flatness test
中文摘要	以大型空间望远镜、空间对地详查相机、极大规模集成电路制造设备以及 高能激光核聚变系统为代表的现代光学系统对于大口径光学元件面形精度有着 极高的要求。子孔径拼接干涉测量技术实现大口径检测，具有低成本、高精度 和高空间分辨率的优点，得到国内外学者的广泛研究。论文针对高精度平面面 形子孔径拼接干涉测量应用，围绕平面面形绝对检验算法和子孔径拼接算法开 展研究。 平面面形绝对检验方面，论文对现有典型平面面形绝对检验技术进行了总 结，对绝对检验中旋转偏心等误差源进行了量化分析，比较了典型算法的综合 性能，进行了绝对检验算法的选择，提出了一种提高检测精度和可操作性的绝 对检验夹具。干涉仪标准镜的面形误差影响每个子孔径的测量结果，是拼接检 测的一个重要误差源。采用绝对检验技术，对标准镜面形进行定标，从而使子 孔径面形测量不受标准镜精度的制约，提高拼接精度。运用前36项Zernike多 项式构建被测平面，对边缘噪声、平面原始精度、旋转角度与偏心误差等因素 对平面面形绝对检验技术测量精度的影响进行了模拟分析。结果表明以奇偶函 数法、旋转对称法、镜面对称法为代表的典型绝对检验技术对被测平面原始精 度、干涉图分辨率和旋转角度误差不敏感，而对边缘噪声和旋转偏心误差敏感。 实际测量中，建议采用综合性能最好的奇偶函数法，采用辅助夹具将旋转轴心 对准误差控制在<2 个像素，测量区域取~95%全孔径中心面积。 子孔径拼接方面，在比较两两拼接、目标函数拼接等拼接算法的基础上， 研究了拼接位移台定位误差、子孔径离散噪点对拼接测量的影响，提出了一种 拼接位移台定位误差补偿子孔径拼接算法，开发了基于最小二乘两两拼接的平 行并行模式子孔径拼接 Matlab 软件。运用 Zernike 多项式和 Zygo 干涉仪实测 数据文件构建全孔径波面，进行子孔径划分，考虑拼接位移台定位误差，在子 孔径数据中加入插值、倾斜和平移误差后评估了拼接算法的可用性和噪声性能。 对于连续光滑平面，在拼接位移台定位误差小于 CCD 单个像素对应探测区域 的1/10 时，其对拼接测量的影响可以忽略；调整离散噪点阈值，使噪点数为全 孔径像素数的0.01%时，也可以显著减小子孔径离散噪点对拼接测量的影响。
英文摘要	Modern optical systems have extremely high requirements on the surface figure of large aperture optical devices, especially in large space telescopes, space surveillance cameras, large scale integrated circuit manufacturing equipments and high energy laser fusion systems. Test large aperture optical device using subaperture stitching interferometry has the merits of low cost, high measurement accuracy and spatial resolution. It has attracted a wide spread attention worldwide. Aim at realizing a high precision subaperture stitching interferometer for large aperture flatness test, the algorithms of absolute flatness test and subaperture stitching are studied in this dissertation. In the aspect of absolute flatness test, a brief review and comparison of several mainstream absolute flatness test methods are given first. Then, quantitative analysis is carried out for several error sources such as rotation eccentricity in absolute test. The overall performances of these methods are compared to select the most robust one. A new kind of absolute test gripper which improves measurement precision and practicability is also proposed. The measurement results of every subaperture are influenced by the figure errors of reference plate, which is a main error in stitching test. After calibrating reference plate by absolute test, this problem can be solved, and stitching accuracy is improved. The first 36 Zernike polynomials are used to construct several virtual flats under test. The impacts of edge noise, figure grades of the flats under test, rotation angle error and rotation eccentricity et al. on measurement error of absolute test are analyzed respectively. Simulation results show that the measurement error is not sensitive to figure of flats, resolution of interferogram and rotation angle error. However, it is sensitive to edge noise and rotation eccentricity. In an absolute test system, it is recommended that odd-even function method be adopted, and the alignment error of rotation axis should be controlled in 2 pixels using some assistance clamp, and the effective measuring region is ~95% central area of the whole surface. In the aspect of subaperture stitching, after comparing several different subaperture stitching algorithms, such as double subaperture stitching, global optimization with objective function algorithm et al., the influence of positioning error of scanning stage and subaperture discrete noisy pixels on stitching measurement is studied. A subaperture stitching algorithm for the compensation of positioning error in scanning stage is proposed. A set of subaperture stitching software using Matlab is developed. Zernike polynomials and actual phase acquired by Zygo interferometer are used to construct the whole aperture flats. Then, sub-aperture data are synthesized with position error, tilt error and piston error added. The applicability and noise performance of subaperture stitching algorithms are evaluated. It comes to conclusion that the influence of positioning error on stitching test is negligible, when it is less than 1/10 of one CCD pixel corresponding size. The impact of subaperture discrete noisy pixels on stitching test will reduce significantly when the ratio threshold of the number of noisy pixels is ~0.01% of the whole pixels.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16723]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	徐洋. 大口径平面面形子孔径拼接干涉测量技术研究[D]. 中国科学院上海光学精密机械研究所. 2012.

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