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题名	KDP晶体SiO&ltsub>2&lt/sub>基防潮减反膜研究
作者	熊怀
学位类别	硕士
答辩日期	2010
授予单位	中国科学院上海光学精密机械研究所
导师	唐永兴
关键词	溶胶-凝胶 KDP晶体 防潮减反膜 太阳能玻璃 KrF激光器
其他题名	Moisture-resistant antireflective Coatings for Potassium Dihydrogen Phosphate (KDP) Crystals
中文摘要	在高功率激光装置中,溶胶-凝胶法制备光学薄膜已成为一种必要的手段。本文主要围绕KDP晶体SiO2基防潮减反膜、应用在太阳能玻璃和准分子激光器的SiO2减反膜的制备及其性能变化等内容展开研究。 论文第一章综述了溶胶－凝胶技术原理与应用。重点对该技术制备薄膜过程的各个环节和特点作了详细介绍，特别是在高功率激光装置的使用状况，并介绍了国内外在该领域增透膜和防潮膜的研究进展。 论文第二章主要研究应用在KDP晶体上的防潮型减反膜。在SiO2溶胶合成阶段进行化学改性，将六甲基二硅氮烷（HMDS）引入SiO2溶胶,制得稳定的胶体。采用旋转法在磷酸二氢钾KDP晶体表面涂膜,涂膜晶体峰值透过率99％以上。膜层光学均匀性良好,表面粗糙度均方根值为0.94nm。膜层疏水性能好,水接触角达到140。涂制疏水性SiO2基减反膜的KDP晶体无需热处理就具有较好的疏水防潮性能,与目前激光器使用的防潮－减反双层膜相比,在室温高湿度条件下涂膜晶体透过率下降情况大致相当。 论文第三章介绍了SiO2减反膜技术发展到太阳能玻璃减反膜。喷涂法对太阳能超白玻璃涂制减反膜，采用先涂膜后钢化的技术路线使膜层与超白玻璃界面融合，膜层结构为玻璃态结构，膜层还通过了湿热、盐雾、附着力、冷凝水、耐沾污膜层、耐酸等各项试验考核。最佳工艺时正入射组件功率增加2.82%。涂膜后表面粗糙度良好，户外使用后雨水冲刷可以很容易冲去灰尘。 论文第四章将SiO2减反膜应用到准分子激光器上，并研究了激光器腔体上石英窗口的抗氟气腐蚀减反膜。抗氟气腐蚀膜层的激光破坏阈值为2.75J/cm2，透过率增加5%以上。248nm激光波长SiO2减反膜减反效果好，透过率>99%。
英文摘要	Sol-Gel coatings have already got the extensive application in the optical component of high power laser. The main content in this dissertation was the study of the preparation and performance of the moisture-resistant antireflective coatings for KDP crystals, the antireflective coatings for solar glass and KrF laser were studied. In chapter one, the basic principle and applications of sol-gel technique were reviewed, as well as sol-gel derived coatings. Research progress of sol-gel derived coatings in high power laser system was summarized in detail, especially AR and Moisture-resistant coatings for KDP crystal. In chapter two, The Si-OH group on particle in the silica colloidal suspension was modified to Si-O-Si(CH3)3 non-polar hydrophobic group using hexa-methyl-disilazane (HMDS). The organic modified silica antireflective (AR) coatings coated on potassium di-hydrogen phosphate (KDP) crystal and silica glass substrates by spinning method, the coating had good moisture-resistant property. The transmission of coated substrate was above 99%. The optical roughness Ra was 0.94 nm and the water contact angle of coating was about 140. The HMDS modified SiO2 sol in non-polar solvents which need no treatment can be used KDP crystals. In the condition of the room temperature and high humidity, the transmittance decreasing of KDP crystals with the moisture-resistant antireflective coating was equal to the MR/AR two-layer coating. In chapter three, the porous AR silica coating were prepared by spraying for solar glass followed by a thermal curing at 650-730C taking place simultaneously with the glass toughening, the coating structure was ceramics after glass toughening. A comprehensive range of tests has been selected to demonstrate the durability of the porous AR silica coating, including damp heat test, neutral salt mist test, adhesion tape test, condensation, dirt pickup resistance and acid resistance. The AR coated solar glass could increase 2.82% power output in 0 incident angle. The coating had the fine optical roughness ,water droplets can remove the soil easily. In chapter four, SiO2 antireflective coating was applied to the excimer laser and studied the anti-fluoride antireflective coating on the amplifier windows was studied. The laser damage threshold of anti-fluoride coatings on silica glass is 2.75J/cm2,the transmittance increasing of coated silica glass is more than 5%.The transmission of fourth harmonic SiO2 AR coatings was studied，more than 99% at the wavelength of 248nm.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16682]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	熊怀. KDP晶体SiO&ltsub>2&lt/sub>基防潮减反膜研究[D]. 中国科学院上海光学精密机械研究所. 2010.

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