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题名	位相调制超分辨及检测技术
作者	罗红心
学位类别	博士
答辩日期	2005
授予单位	中国科学院上海光学精密机械研究所
导师	周常河
关键词	超分辨 高数值孔径 消零点位相板 波面检测 光栅表面检测
其他题名	Phase modulation superresolution and measurement technology
中文摘要	光存储中聚焦光斑的尺寸决定于系统所用激光波长和透镜数值孔径，更小的聚焦光斑对于光存储来说至关重要。然而，目前的技术手段很难再提高光盘中透镜的数值孔径和缩短激光波长。本论文中，我们研究了能够压缩Airy斑的超分辨方法，这种方法与激光波长无关，可以用于光存储技术中以提高存储密度。本论文以位相调制超分辨及其检测技术展开研究。首先对环带振幅型和位相型光瞳滤波器的超分辨进行了比较，利用标量衍射理论详细描述了两环带结构时两种滤波器的超分辨效果，理论计算表明位相型滤波器除了可以得到超分辨外，还可以得到圆环达曼光栅及平顶光束等特殊效应，而振幅型只能得到超分辨效果。理论和实验结果表明两种滤波器都可得到明显的超分辨效果，而位相型滤波器在光能利用率上优于振幅型滤波器。成果发表在ApPliedOPtics（HongxinLuo，ChangheZhou，Appl·Opt·，43，（34），6242一6247（2004））。下一代光存储中透镜的数值孔径为0．8一0．85，标量衍射理论在这种情况下已经得不到精确的结果，需要采用矢量理论来分析高数值孔径透镜的聚焦及超分辨特性。针对数值孔径为0．8的透镜，采用矢量衍射理论分析了其聚焦及超分辨特性；实验上采用头部开门为50-80nm的近场光学显微镜用光纤探针精确测量了高数值孔径透镜的焦点变化。高数值孔径卜的超分辨在光存储方面有着生用的应用前景。成果已经投稿于OpticsCommunication(HongxinLuo, ChangheZhou. HuaZou, Yullqingltl，"StlperresolutiollforhighnumericalaperttureobjectiveOptCommun．，已投稿）。利用位相板对波面变化的敏感性，我们提出了利用消零点位相板进行波向检测的方法。消零点位相板使入射的波面经过该位相板调制后的聚焦光斑的零级谱点光强为零。"当一束平面光波经消零点位调制后，其衍射零级谱点光强为零。当入射波前中插入很小的畸变时，零级谱点的强度就会增加。采用一级谱点光强对零级谱点光强的比值作为判断标准，来消除激光光强绝对值的影响。对于平面波畸变探测，这种方法效率高、结构简单、成本低，探测灵敏度优于l％波长。成果将在AppliedOptics上发表（HongxinLuo，changhezhou，Huazou，：HighSensitiveWavefrontSensorbyUsingaNon一zero一orderPhasePlate，Appl．Opt．，已录用）。利用高数值孔径焦点测量装置，我们提出了一种基于光栅自成像效应的纳米光纤探针扫描检测光栅表面技术。这种方法将光栅自成像效应与扫描近场光学显微技术结合起来，检测过程完全是无损地。该方法的最显著的优点在于其结构简单、工作可靠而且检测快速。应用这种检测方法，对三种不同的光栅进行了实验研究，实验结果表明这种方法对于高密度光栅表面质量检测是有效的。相关成果发表在OpticsCommunication上。（HongxinLuo，C恤nghezhou，Huazou，YunqingLu，opt．Commun．248，97－103（2005））。
英文摘要	Smaller focal points are essential for the development of the next-generation optical disc. The size of focal point depends on the diffraction effect that is dependant on the numerical aperture of a lens and the wavelength of light. However, increase of the numerical aperture and decrease of the light wavelength will be ultimately limited due to the technical difficulty of fabricating a too-high numerical aperture (NA) lens and the too-short wavelength laser. In this dissertation, we studied another approach of using the superresolution technology to compress the size of the so-called Airy spot for the next-generation optical disc, which is independent on the wavelength of laser. This dissertation studies phase modulation for superresolution and measurement technology. Characteristics of annular amplitude and phase filters are compared firstly. Two-zone phase and amplitude filters are studied in detail as the inner zone is increased with scalar diffraction theory. Numerical simulations show that the phase filter can achieve the superresolution effect, the circular Dammann effect, and the flat-top intensity for different applications, while the two-zone amplitude filter only can generate the superresolution effect. The experimental results show that both amplitude and phase filters can achieve superresolution effects evidently. Generally, the phase superresolution filter is recommended for its higher efficiency and special diffraction patterns that are impossible to achieve with the amplitude one. This result has been published in Applied Optics (Hongxin Luo, Changhe Zhou, Appl. Opt., 43, (34), 6242-6247(2004)). The NA of the lens used in the next generation optical storage is 0.8-0.85. Vector diffraction theory should be adopted in the situation of high NA lens. The intensity distribution of the superresolved focus is calculated with the vectorial diffraction integral in simulation. Superresolution effect of a high numerical aperture objective with a phase filter is observed experimentally. A tapered near field optical fiber probe with an opening of 50-80 nm mounted in the SNOM apparatus is used to detect superresolution intensity. Superresolution technique for high NA lens should be highly interesting of the next-generation pickup head for reading the high storage of the optical discs. This result has been submitted to Optics Communication (Hongxin Luo, Changhe Zhou, Hua Zou, Yunqing Lu, "Superresolution for high numerical aperture objective", Opt. Commun., submitted). We propose a novel high sensitive wavefront detection method for quick check of a flat wavefront by taking advantage of a non-zero-order 7t-phase plate that yields the non-zero-order diffraction pattern. When a light beam with a flat wavefront illuminates the phase plate, the intensity of the zero-order is zero. When there is a slight distortion of the wavefront, the zero-order intensity will be increased. The ratio of the first-order intensity to that of the zero-order is used as the criterion to judge whether the wavefront under test is a flat one, eliminating the influence of the background light. This method is simple, robust and efficient for flat wavefront deviation measurement with high sensitivity of better than 1 % wavelength. This result will be published in Applied Optics (Hongxin Luo, Changhe Zhou, Hua Zou, "High Sensitive Wavefront Sensor by Using a Non-zero-order Phase Plate", Appl. Opt., accepted). A Talbot scanning near-field optical microscopy (SNOM) method for non-contact evaluating of high-density gratings is proposed. This method combines the Talbot self-imaging effect of the gratings and the conventional SNOM technique without damage to the grating under test. The significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. Experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings. This result has been published in Optics Communication. (Hongxin Luo, Changhe Zhou, Hua Zou, Yunqing Lu, opt. Coraraun. 248, 97-103(2005)).
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/15589]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	罗红心. 位相调制超分辨及检测技术[D]. 中国科学院上海光学精密机械研究所. 2005.

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