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题名	氧化物雕塑双折射薄膜的制备及性能分析
作者	肖秀娣
学位类别	博士
答辩日期	2010
授予单位	中国科学院上海光学精密机械研究所
导师	邵建达
关键词	雕塑薄膜 斜入射沉积 各向异性 双折射 主轴折射率
其他题名	Preparation and properties of oxide sculptured birefringent thin films
中文摘要	随着光电子技术和光通讯技术的迅猛发展，薄膜材料越来越受到人们的重视。用倾斜沉积技术制备的雕塑双折射薄膜，由于其具有特殊的光学特性，而受到广大薄膜工作者的青睐。 本论文基于对多种氧化物雕塑薄膜的设计、制备和性能分析，从工艺角度优化了雕塑薄膜的双折射特性，初步显示出不同于传统光学多层膜的性能和潜在应用，并对雕塑薄膜进行了表面改性及主轴折射率的计算等研究工作。 运用电子束蒸发的倾斜沉积技术制备了多种氧化物的雕塑薄膜，如Nb2O5, Ta2O5, TiO2, SiO2等，研究了薄膜的沉积条件与光学各向异性的关系，找到了最佳双折射的沉积条件；沉积了Ag掺杂SiO2薄膜，研究了沉积条件与薄膜的各向异性吸收特性和角度选择各向异性关系，表明了通过单层薄膜制备宽波段偏振分离滤光片的可能性；沉积了ATO透明导电薄膜，研究了沉积条件与薄膜的光学和电学各向异性的关系，得到了多功能集成的透明导电雕塑薄膜。 在制备氧化物雕塑薄膜的基础之上，通过后处理找到了提高薄膜双折射特性的合适条件，如通过对TiO2雕塑薄膜进行热处理，使得薄膜的双折射显著提高，为薄膜相位延迟片的应用奠定了基础；通过对SiO2雕塑薄膜进行ZrO2溶胶填充之后，同样可以提高雕塑薄膜的双折射特性，并且获得了具有宽带减反特性的雕塑薄膜。 针对雕塑薄膜的疏松多孔特性，研究了有机物表面改性和表面添加保护层对薄膜光学稳定性的影响，结果表明，有机物表面改性和表面添加保护层都能在一定程度上改善雕塑薄膜的光学稳定性，可以促进雕塑薄膜的实用化。 通过光度法和模拟退火优化方法结合，方便地得到雕塑薄膜的主轴折射率和结构参数，为雕塑薄膜光学元件的灵活设计提供了前提。
英文摘要	With the rapid development of optoelectronic and photocommunication technology, thin films have attracted extensive attention. Birefringent thin films fabricated by oblique angle deposition attract great attention due to their unique optical properties. In present dissertation, on the basis of design, preparation and analysis of properties of different oxide sculptured thin films, the birefringence was improved by post-treatment, which displayed the unique properties and potential application of sculptured thin films. Besides the investigations mentioned above, surface modification and calculation of principle refractive index were also studied. Using electron beam oblique angle evaporation, different oxide sculptured thin films were prepared, such as Nb2O5, Ta2O5, TiO2, SiO2, etc. The relationship between deposition parameters and optical anisotropy was studied and the optimal deposition condition for birefringence was found. The optical anisotropy and angular selective anisotropy was investigated in Ag doped SiO2 thin films. Using the angular selective anisotropy, the broadband polarization splitting filter could be obtained in single layer thin film. The relationship between deposition parameters and electrical and optical anisotropy was investigated in ATO thin films and the transparent conductive sculptured thin film was obtained. On the basis of preparation of sculptured thin films, the appropriate condition to improve birefringence by post-treatment was found. The birefringence of TiO2 sculptured thin films was greatly improved after heat treatment, which can be used as thin film phase retarder. After filling ZrO2 sol into SiO2 thin films, the birefringence of SiO2 thin films was remarkably improved and the broadband antireflective properties was obtained. Considering the porous structure of sculptured thin films, the organic surface modification and deposition the protective layer were used to improve the optical stability of sculptured thin films. The results illustrated that silanization and protective layer were feasible to improve the optical stability in some extent, which could be useful for thin film application. Combination of photometric method and simulation annealing method, the principal refractive index and structural parameters were easily obtained, which could be used as the precondition for optical component of sculptured thin films design.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/15296]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	肖秀娣. 氧化物雕塑双折射薄膜的制备及性能分析[D]. 中国科学院上海光学精密机械研究所. 2010.

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