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题名	光学薄膜弱吸收快速检测技术及装置
作者	陶春先
学位类别	博士
答辩日期	2009
授予单位	中国科学院上海光学精密机械研究所
导师	邵建达
关键词	光学薄膜 吸收测量 光热效应 表面热透镜 图像锁相
其他题名	Fast Measurement Technique and System for Optical Coating Absorption
中文摘要	光学薄膜作为激光系统的重要元件，吸收损耗影响激光器件的光学性能甚至寿命。高功率激光器对光学薄膜的吸收及热缺陷更加敏感。光热技术中的表面热透镜技术以其高灵敏度、稳定及无损非接触的特点，成为光学薄膜弱吸收测量的重要手段。应用表面热透镜技术测量中，面吸收测量的逐点扫描耗时长，而且空间分辨率较低。针对现存测量模式的不足，本文将实现薄膜吸收的快速测量方法和装置作为主要的研究内容。 本文综述了薄膜对激光的吸收机制，总结了光学薄膜吸收的主要测量方法及国内外研究现状。系统论述了光热测量技术中的温度场理论、光热形变理论及菲涅耳衍射理论。在上述理论的基础上，理论分析了表面热透镜信号的表征和吸收信号标定方法。实验研究了薄膜激光吸收与激光损伤的关系。 作为本文的研究重点，对光学薄膜吸收及热缺陷的快速检测技术做了深入研究。系统研究了弱信号检测的电子锁相及图像锁相检测原理。基于表面热透镜原理和图像锁相技术，提出了利用CCD相机实现光学薄膜吸收快速测量的图像方法。分析了图像测量方法得到的薄膜吸收信号的表征和优化方法。 依据上述测量理论设计了薄膜弱吸收的快速测量装置。基于虚拟仪器技术开发了装置测量程序。详细说明了该测量装置的组成结构、控制电路、控制软件及操作方法。测量装置的光机电一体化设计使其具有较高的自动化程度。标定了测量系统的测量速度、灵敏度、空间分辨率等性能参数，分析了测量的误差来源及对测量结果的影响程度。利用该测量装置对薄膜样品的面吸收及热缺陷分布进行了检测。分析了栅扫描模式和图像模式在测量速度和灵敏度上的特点。 本文最后总结了所做的主要工作和创新点，针对当前的研究成果对下一步工作提出了建议。
英文摘要	As an important component of the laser system, the absorption loss of optical coatings has a significant impact on optical properties of laser devices and even their useful life. High power laser is even more sensitive to optical coatings absorption and thermal defects. The surface thermal lens technique (STL) has become an important means of absorption measurements for optical coatings, because of advantages of high sensitivity, stability and non-destructive features. However, there are some limitations in whole-field detection in its raster scanning mode, such as time-consuming and low spatial resolution. So the main purpose of this paper is focused on the study of new method and devices for fast aborption measurement. The thin film absorption mechanism is summarized and the overviews of main measuring methods and research status are presented. The temperature field, heat induced deformation and Fresnel diffraction theory are systematically discussed. Based the theories above, the characteristic of STL signal and calibration of absorption value are theoretically analyzed. The relationship between absorption and laser induced damage is studied in experiment. As the research focus of this article, the theory of fast detection for weak absorption and thermal defects has been thorough studied. The Principle of electronic phase-locked technique and image lock-in technique for weak signal detection is investigated systematically. Based on STL and image lock-in technique, a new image detection method using CCD camera for fast detection is proposed. And the image signal of absorption is analyzed for optimization of the detection method. Based on the theory mentioned above, a fast measurement system for optical coatings absorption is designed. Measurement software is developed based on Virtual Instrument Technology. The structure, control Circuit, software and Operation are specified. Duo to the optical-mechanical-electrical integration, the measurement system reaches a higher degree of automation. The Instrument performance, such as measuring speed, sensitivity and spatial resolution are identified. Analysis of error sources and the impact on the results is completed. The measurement for absorption of coatings is made using this system. And thus the comparison of raster scanning and image lock-in is made in the view of speed and sensitivity. At the end of this paper, all the works are conclude and some suggestion to the following works is given.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/15276]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	陶春先. 光学薄膜弱吸收快速检测技术及装置[D]. 中国科学院上海光学精密机械研究所. 2009.

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