Propagation of focused ultrashort pulse laser during micromachining of sapphire | |
Wang, Chengwei; Zhao, Quanzhong; Qian, Jing; Li, Yangbo; Wang, Guande; Zhang, Yang; Pan, Huaihai; Bao, Zongjie; Bai, Feng; Fan, Wenzhong | |
2015 | |
会议名称 | 4th pacific rim laser damage symposium on optical materials for high-power lasers |
通讯作者 | wang, cw (reprint author), tongji univ, sch phys sci & engn, shanghai 200092, peoples r china. |
英文摘要 | scattering effect has great effect on machining morphology in sapphire processed by ultrashort pulse laser. on one hand, scattering leads to saturation of machining length despite the increase of pulse energy. on the other hand, scattering results in undamaged core in the elliptical damaged shell. when the laser intensity is above half the damage threshold, the electric field is scattered to 0 and doesn't contribute to the laser intensity at latter position. the physical model which combines scattering effect, linear and nonlinear optical effects matches well with machining morphology of sapphire at different laser parameters, including pulse energies, focus positions, focal length and pulse duration. at first laser with lower pulse energy, for instance 25 mu j, processes the inner part of sapphire. during micromachining of sapphire, the focus positions move from the bottom to the top. at last the laser with higher pulse energy, 150 mu j for example, fabricates the surface. the objective lens with the focal length of 20 mm is suitable for machining sapphire and the optimal pulse duration is 950 fs. |
收录类别 | CPCI |
会议录 | pacific rim laser damage 2015: optical materials for high-power lasers |
会议录出版者 | spie-int soc optical engineering |
语种 | 英语 |
内容类型 | 会议论文 |
源URL | [http://ir.siom.ac.cn/handle/181231/17206] |
专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
作者单位 | 1.[Wang, Chengwei] Tongji Univ, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China 2.[Wang, Chengwei 3.Zhao, Quanzhong 4.Qian, Jing 5.Li, Yangbo 6.Wang, Guande 7.Zhang, Yang 8.Pan, Huaihai 9.Bao, Zongjie 10.Bai, Feng |
推荐引用方式 GB/T 7714 | Wang, Chengwei,Zhao, Quanzhong,Qian, Jing,et al. Propagation of focused ultrashort pulse laser during micromachining of sapphire[C]. 见:4th pacific rim laser damage symposium on optical materials for high-power lasers. |
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