Propagation of focused ultrashort pulse laser during micromachining of sapphire
Wang, Chengwei; Zhao, Quanzhong; Qian, Jing; Li, Yangbo; Wang, Guande; Zhang, Yang; Pan, Huaihai; Bao, Zongjie; Bai, Feng; Fan, Wenzhong
2015
会议名称4th pacific rim laser damage symposium on optical materials for high-power lasers
通讯作者wang, cw (reprint author), tongji univ, sch phys sci & engn, shanghai 200092, peoples r china.
英文摘要scattering effect has great effect on machining morphology in sapphire processed by ultrashort pulse laser. on one hand, scattering leads to saturation of machining length despite the increase of pulse energy. on the other hand, scattering results in undamaged core in the elliptical damaged shell. when the laser intensity is above half the damage threshold, the electric field is scattered to 0 and doesn't contribute to the laser intensity at latter position. the physical model which combines scattering effect, linear and nonlinear optical effects matches well with machining morphology of sapphire at different laser parameters, including pulse energies, focus positions, focal length and pulse duration. at first laser with lower pulse energy, for instance 25 mu j, processes the inner part of sapphire. during micromachining of sapphire, the focus positions move from the bottom to the top. at last the laser with higher pulse energy, 150 mu j for example, fabricates the surface. the objective lens with the focal length of 20 mm is suitable for machining sapphire and the optimal pulse duration is 950 fs.
收录类别CPCI
会议录pacific rim laser damage 2015: optical materials for high-power lasers
会议录出版者spie-int soc optical engineering
语种英语
内容类型会议论文
源URL[http://ir.siom.ac.cn/handle/181231/17206]  
专题上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位1.[Wang, Chengwei] Tongji Univ, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China
2.[Wang, Chengwei
3.Zhao, Quanzhong
4.Qian, Jing
5.Li, Yangbo
6.Wang, Guande
7.Zhang, Yang
8.Pan, Huaihai
9.Bao, Zongjie
10.Bai, Feng
推荐引用方式
GB/T 7714
Wang, Chengwei,Zhao, Quanzhong,Qian, Jing,et al. Propagation of focused ultrashort pulse laser during micromachining of sapphire[C]. 见:4th pacific rim laser damage symposium on optical materials for high-power lasers.
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