Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing
	Xu, Jian ; Wu, Dong ; Hanada, Yasutaka ; Chen, Chi ; Wu, Sizhu ; Cheng, Ya ; Sugioka, Koji ; Midorikawa, Katsumi
刊名	lab chip
	2013
卷号	13 期号:23 页码:4608
通讯作者	xu, j (reprint author), riken, adv sci inst, laser technol lab, 2-1 hirosawa, wako, saitama 3510198, japan.
英文摘要	space-selective metallization of the inside of glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating is demonstrated. femtosecond laser direct writing followed by thermal treatment and successive chemical etching allows us to fabricate three-dimensional microfluidic structures inside photosensitive glass. then, femtosecond laser ablation followed by electroless metal plating enables flexible deposition of patterned metal films on desired locations of not only the top and bottom walls but also the sidewalls of fabricated microfluidic structures. a volume writing scheme for femtosecond laser irradiation inducing homogeneous ablation on the sidewalls of microfluidic structures is proposed for sidewall metallization. the developed technique is used to fabricate electrofluidics in which microelectric components are integrated into glass microchannels. the fabricated electrofluidics are applied to control the temperature of liquid samples in the microchannels for the enhancement of chemical reactions and to manipulate the movement of biological samples in the microscale space.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14668]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Xu, Jian 2.Wu, Dong 3.Hanada, Yasutaka 4.Wu, Sizhu 5.Sugioka, Koji 6.Midorikawa, Katsumi] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan 7.[Chen, Chi] RIKEN, Adv Sci Inst, Near Field NanoPhoton Res Team, Wako, Saitama 3510198, Japan 8.[Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Xu, Jian,Wu, Dong,Hanada, Yasutaka,et al. Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing[J]. lab chip,2013,13(23):4608.
APA	Xu, Jian.,Wu, Dong.,Hanada, Yasutaka.,Chen, Chi.,Wu, Sizhu.,...&Midorikawa, Katsumi.(2013).Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.lab chip,13(23),4608.
MLA	Xu, Jian,et al."Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing".lab chip 13.23(2013):4608.