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	Quantitative measurement of optical surfaces using an improved knife edge
	Jing HongwEi; Yang WEi; Fan Bin; Wan Yongjian; Wu Shibin; Wu Fan; Fan Tianquan
	2009
会议名称	Proceedings of SPIE
会议日期	2009
卷号	7283
通讯作者	Jing HongwEi
中文摘要	One of the oldest techniques for sensing optical abberations is Foucault knife edge test. Qualitative properties of knife edge test have been utilized over the past 150 years to assess the quality of an optic or optical system. Much work and analysis have been performed since Foucault,but no satisfactory results have been found. This paper describes a method that upgrades the knife edge tester from a qualitative tester to a quantitative tester.Firstly,the traditional knife edge tester is upgraded to an improved one enabling the knife to cut the focus from horizontal direction and vertical direction.Secondly,the 2 sets of shadows were integrated to form complete mirror shadows.Finally,a mathematical model is established to quantitatively evaluate the surface error from the shadows. An experiment has been done using the method. The calculated deviations of the optical surface are compared with the results measured by ZYGO interferometer. Two measurement results show resemblance.
英文摘要	One of the oldest techniques for sensing optical abberations is Foucault knife edge test. Qualitative properties of knife edge test have been utilized over the past 150 years to assess the quality of an optic or optical system. Much work and analysis have been performed since Foucault,but no satisfactory results have been found. This paper describes a method that upgrades the knife edge tester from a qualitative tester to a quantitative tester.Firstly,the traditional knife edge tester is upgraded to an improved one enabling the knife to cut the focus from horizontal direction and vertical direction.Secondly,the 2 sets of shadows were integrated to form complete mirror shadows.Finally,a mathematical model is established to quantitatively evaluate the surface error from the shadows. An experiment has been done using the method. The calculated deviations of the optical surface are compared with the results measured by ZYGO interferometer. Two measurement results show resemblance.
收录类别	EI
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7931]
专题	光电技术研究所_质量处（质检中心）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Jing HongwEi,Yang WEi,Fan Bin,et al. Quantitative measurement of optical surfaces using an improved knife edge[C]. 见:Proceedings of SPIE. 2009.

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