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	Error separation technique for measuring aspheric surface based on dual probes
	Wei, Zhong-Wei1,2; Jing, Hong-Wei1; Kuang, Long1; Wu, Shi-Bin1
	2013
会议名称	Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications
会议日期	2013
卷号	8905
页码	89051S
中文摘要	In this paper, we present an error separation method based on dual probes for the swing arm profilometer to calibrate the rotary table errors. Two probes and the rotation axis of swinging arm are in a plane. The scanning tracks cross each other as both probes scan the mirror edge to edge. Since the surface heights should ideally be the same at these scanning crossings, this crossings height information can be used to calibrate the rotary table errors. But the crossings height information contains the swing arm air bearing errors and measurement errors of probes. The errors seriously affect the correction accuracy of rotary table errors. The swing arm air bearing errors and measurement errors of probes are randomly distributed, we use least square method to remove these errors. In this paper, we present the geometry of the dual probe swing arm profilometer system, and the profiling pattern made by both probes. We analyze the influence the probe separation has on the measurement results. The algorithm for stitching together the scans into a surface is also presented. The difference of the surface heights at the crossings of the adjacent scans is used to find a transformation that describes the rotary table errors and then to correct for the errors. To prove the error separation method based on a dual probe can successfully calibrate the rotary table errors, we establish SAP error model and simulate the effect of the error separation method based on a dual probe on calibrating the rotary table errors. © 2013 SPIE.
英文摘要	In this paper, we present an error separation method based on dual probes for the swing arm profilometer to calibrate the rotary table errors. Two probes and the rotation axis of swinging arm are in a plane. The scanning tracks cross each other as both probes scan the mirror edge to edge. Since the surface heights should ideally be the same at these scanning crossings, this crossings height information can be used to calibrate the rotary table errors. But the crossings height information contains the swing arm air bearing errors and measurement errors of probes. The errors seriously affect the correction accuracy of rotary table errors. The swing arm air bearing errors and measurement errors of probes are randomly distributed, we use least square method to remove these errors. In this paper, we present the geometry of the dual probe swing arm profilometer system, and the profiling pattern made by both probes. We analyze the influence the probe separation has on the measurement results. The algorithm for stitching together the scans into a surface is also presented. The difference of the surface heights at the crossings of the adjacent scans is used to find a transformation that describes the rotary table errors and then to correct for the errors. To prove the error separation method based on a dual probe can successfully calibrate the rotary table errors, we establish SAP error model and simulate the effect of the error separation method based on a dual probe on calibrating the rotary table errors. © 2013 SPIE.
收录类别	EI
学科主题	Bearings (machine parts) - Least squares approximations - Optical testing - Probes - Profilometry
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7919]
专题	光电技术研究所_质量处（质检中心）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China 2.University of Chinese, Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Wei, Zhong-Wei,Jing, Hong-Wei,Kuang, Long,et al. Error separation technique for measuring aspheric surface based on dual probes[C]. 见:Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications. 2013.

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