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	Optical super resolution technology and its application
	Nan, Wang1,2; Wei, Jiang1; Wei, Yan1; Song, Hu1
	2013
会议名称	2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
会议日期	2013
页码	347-352
中文摘要	With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.
英文摘要	With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research. © 2013 IEEE.
收录类别	EI
学科主题	Information technology - Manufacture - Optical data storage
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7656]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China 2.University of Chinese Academy of Sciences, Beijing, 100039, China
推荐引用方式 GB/T 7714	Nan, Wang,Wei, Jiang,Wei, Yan,et al. Optical super resolution technology and its application[C]. 见:2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings. 2013.

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