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	Study of inverted thermal evaporation for large mirror
	Pei, Wenjun; Liu, Hongxiang
	2014
会议名称	Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
会议日期	2014
卷号	9280
页码	92800H
中文摘要	From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.
英文摘要	From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1xNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm. © 2014 SPIE.
收录类别	EI
学科主题	Aluminum - Coatings - Evaporation - Manufacture - Mirrors - Optical testing - Reflection - Telescopes - Thermal evaporation
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7862]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
推荐引用方式 GB/T 7714	Pei, Wenjun,Liu, Hongxiang. Study of inverted thermal evaporation for large mirror[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes. 2014.

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