Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
	Lin, Jintian ; Xu, Yingxin ; Tang, Jialei ; Wang, Nengwen ; Song, Jiangxin ; He, Fei ; Fang, Wei ; Cheng, Ya
刊名	appl. phys. a-mater. sci. process.
	2014
卷号	116 期号:4 页码:2019
关键词	MONOLITHIC MICRORESONATOR MICROCAVITIES GENERATION MODES CHIP
通讯作者	cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, shanghai 201800, peoples r china.
英文摘要	we report on fabrication of on-chip calcium fluoride (caf2) microdisk resonators using water-assisted femtosecond laser micromachining. focused ion beam (fib) milling is used to create ultra-smooth sidewalls. the quality (q) factors of the fabricated microresonators are measured to be 4.2 x 10(4) at wavelengths near 1,550 nm. the q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. this technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/12627]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Lin, Jintian 2.Tang, Jialei 3.Wang, Nengwen 4.Song, Jiangxin 5.He, Fei 6.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 7.[Lin, Jintian 8.Tang, Jialei 9.Song, Jiangxin] Univ Chine
推荐引用方式 GB/T 7714	Lin, Jintian,Xu, Yingxin,Tang, Jialei,et al. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining[J]. appl. phys. a-mater. sci. process.,2014,116(4):2019.
APA	Lin, Jintian.,Xu, Yingxin.,Tang, Jialei.,Wang, Nengwen.,Song, Jiangxin.,...&Cheng, Ya.(2014).Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining.appl. phys. a-mater. sci. process.,116(4),2019.
MLA	Lin, Jintian,et al."Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining".appl. phys. a-mater. sci. process. 116.4(2014):2019.