Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses
	Xu, M.-F. and W. Huang
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2015
卷号	23 期号:8 页码:2143-2148
英文摘要	As high-numerical aperture (NA) lithographic lenses have larger fields of view (FOVs) and nonuniform wavefront aberration distributions, this paper proposes an automatic optimized design method to reduce the the largest wavefront aberration of all FOVs in design processing. The method adds an external loop optimization procedure which can automatically adjust sampling weight into the local optimization procedure of a lithographic lens to balance wavefront aberrations and to reduce the largest wavefront aberration automatically. By using the proposed method, the uniformity of wavefront aberrations gets better and the largest wavefront aberration has been reduced to 63% of the primary value. It shows that the method has a better application in Code V. Meanwhile, it not only reduces the design time consumption but also the dependence on the design experiences of the designers. this method can also be applied in design of other optical systems with higher imaging quality. , 2015, Chinese Academy of Sciences. All right reserved.
收录类别	EI
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56116]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xu, M.-F. and W. Huang. Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(8):2143-2148.
APA	Xu, M.-F. and W. Huang.(2015).Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(8),2143-2148.
MLA	Xu, M.-F. and W. Huang."Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.8(2015):2143-2148.