Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology

	Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology
	Liu, Fengwei ; Wu, Yongqian ; Wu, Fan
刊名	Optics Express
	2015
卷号	23 期号:8 页码:10794-10807
ISSN号	1094-4087
通讯作者	Liu, FW (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
中文摘要	The accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America
英文摘要	The accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000353299300125
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7046]
专题	光电技术研究所_先光中心
作者单位	1.[Liu, Fengwei 2.Wu, Yongqian 3.Wu, Fan] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China 4.[Liu, Fengwei] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Liu, Fengwei,Wu, Yongqian,Wu, Fan. Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology[J]. Optics Express,2015,23(8):10794-10807.
APA	Liu, Fengwei,Wu, Yongqian,&Wu, Fan.(2015).Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology.Optics Express,23(8),10794-10807.
MLA	Liu, Fengwei,et al."Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology".Optics Express 23.8(2015):10794-10807.