An electrostatically actuated MEMS tilting mirror based on self-assembly

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	An electrostatically actuated MEMS tilting mirror based on self-assembly
	Wang, Qiang 1,2; Wang, Weimin 1,2; Qiu, Chuankai 1; Yu, Junsheng 2
刊名	Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams
	2015
卷号	27 期号:2 页码:024127
ISSN号	1001-4322
通讯作者	Qiu, Chuankai
中文摘要	An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
英文摘要	An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
学科主题	Electromechanical devices - Electrostatic actuators - Finite element method - Gold - MEMS - Mirrors - Residual stresses
收录类别	EI
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6908]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China
推荐引用方式 GB/T 7714	Wang, Qiang,Wang, Weimin,Qiu, Chuankai,et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,2015,27(2):024127.
APA	Wang, Qiang,Wang, Weimin,Qiu, Chuankai,&Yu, Junsheng.(2015).An electrostatically actuated MEMS tilting mirror based on self-assembly.Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,27(2),024127.
MLA	Wang, Qiang,et al."An electrostatically actuated MEMS tilting mirror based on self-assembly".Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams 27.2(2015):024127.