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	One exposure processing to fabricate spiral phase plate with continuous surface
	Shi, Lifang; Zhang, Zhiyou; Cao, Axiu; Luo, Xue; Deng, Qiling
刊名	Optics Express
	2015
卷号	23期号:7页码:8620-8629
ISSN号	1094-4087
通讯作者	Deng, QL (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
中文摘要	An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America
英文摘要	An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America
收录类别	SCI
语种	英语
WOS记录号	WOS:000352290000065
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7339]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.[Shi, Lifang 2.Cao, Axiu 3.Luo, Xue 4.Deng, Qiling] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China 5.[Zhang, Zhiyou] Sichuan Univ, Minist Educ, Key Lab High Energy Dens Phys & Technol, Chengdu 610064, Sichuan, Peoples R China
推荐引用方式 GB/T 7714	Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,et al. One exposure processing to fabricate spiral phase plate with continuous surface[J]. Optics Express,2015,23(7):8620-8629.
APA	Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,Luo, Xue,&Deng, Qiling.(2015).One exposure processing to fabricate spiral phase plate with continuous surface.Optics Express,23(7),8620-8629.
MLA	Shi, Lifang,et al."One exposure processing to fabricate spiral phase plate with continuous surface".Optics Express 23.7(2015):8620-8629.

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