Determination of optical constants in DUV/VUV

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Determination of optical constants in DUV/VUV
	Guo, Chun 1,2; Kong, Mingdong 1; Lin, Dawei 1; Liu, Cunding 1; Gao, Weidong 1; Li, Bincheng 1
刊名	Chinese Optics Letters
	2013
卷号	11 期号:SUPPL.1 页码:S10607
ISSN号	16717694
通讯作者	Li, B. (bcli@ioe.ac.cn)
中文摘要	An approach for determining the optical constants of the weakly absorbing substrate is developed and applied to obtain the parameters of CaF2 and fused silica substrates in deep ultraviolet (DUV) and vacuum ultraviolet (VUV) range. A method for extracting the optical constants of thin films deposited on strongly absorbing substrate, which is based on the reflectance spectra measured at different angles of incidence, is also presented. The optical constants are determined by fitting the measured spectra to the theoretical models. The proposed method is applied to determine the refractive index and extinction coefficient (n, k) of MgF2 film deposited on silicon substrate by electron beam evaporation with substrate temperature 300°C and deposition rate 0.2 nm/s. The determined n, k values at 193 nm are 1.433 and 9.1×10-4, respectively. © 2013 Chinese Optics Letters.
英文摘要	An approach for determining the optical constants of the weakly absorbing substrate is developed and applied to obtain the parameters of CaF2 and fused silica substrates in deep ultraviolet (DUV) and vacuum ultraviolet (VUV) range. A method for extracting the optical constants of thin films deposited on strongly absorbing substrate, which is based on the reflectance spectra measured at different angles of incidence, is also presented. The optical constants are determined by fitting the measured spectra to the theoretical models. The proposed method is applied to determine the refractive index and extinction coefficient (n, k) of MgF2 film deposited on silicon substrate by electron beam evaporation with substrate temperature 300°C and deposition rate 0.2 nm/s. The determined n, k values at 193 nm are 1.433 and 9.1×10-4, respectively. © 2013 Chinese Optics Letters.
学科主题	Optical constants - Refractive index
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000209349900046
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6624]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Determination of optical constants in DUV/VUV[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10607.
APA	Guo, Chun,Kong, Mingdong,Lin, Dawei,Liu, Cunding,Gao, Weidong,&Li, Bincheng.(2013).Determination of optical constants in DUV/VUV.Chinese Optics Letters,11(SUPPL.1),S10607.
MLA	Guo, Chun,et al."Determination of optical constants in DUV/VUV".Chinese Optics Letters 11.SUPPL.1(2013):S10607.