Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
	Guo, Chun 1,2; Kong, Mingdong 1; Lin, Dawei 1; Liu, Cunding 1; Li, Bincheng 1
刊名	Optics Express
	2013
卷号	21 期号:1 页码:960-967
通讯作者	Guo, C.
中文摘要	Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. © 2013 Optical Society of America.
英文摘要	Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. © 2013 Optical Society of America.
学科主题	Atomic force microscopy - Magnesium compounds - Microstructure - Refractive index - Resistive evaporation - Scanning electron microscopy - X ray diffraction
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000315988100120
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6618]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition[J]. Optics Express,2013,21(1):960-967.
APA	Guo, Chun,Kong, Mingdong,Lin, Dawei,Liu, Cunding,&Li, Bincheng.(2013).Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition.Optics Express,21(1),960-967.
MLA	Guo, Chun,et al."Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition".Optics Express 21.1(2013):960-967.