Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology

	Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology
	Yan-Qing, Z; Jing-Qiu, L; Zhong-Zhu, L; Huang, XH; Le, ZC; Yi, FT; Hou, FJ; Huang, WX; Dong, W; Wang, WB
刊名	ACTA PHYSICA SINICA
	2009
卷号	58 期号:3 页码:1526-1530
关键词	compound refractive lens (CRL) back-mask exposure hourglass shape SU-8
通讯作者	[Yan-Qing, Zhu ; Jing-Qiu, Liang ; Zhong-Zhu, Liang ; Huang Xin-Hua ; Wang Wei-Biao ; Cui Nai-Di] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Jilin, Peoples R China ; [Yan-Qing, Zhu ; Huang Xin-Hua ; Cui Nai-Di] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China ; [Le Zi-Chun ; Dong Wen] Zhejiang Univ Technol, Hangzhou 310032, Zhejiang, Peoples R China ; [Yi Fu-Ting ; Hou Feng-Jie ; Huang Wan-Xia ; Wang Zhi-Li] Chinese Acad Sci, Inst High Energy Phys, Beijing 1000349, Peoples R China
英文摘要	Using back-mask exposure technology, the hourglass-shaped X-ray compound refractive lens (XCRL) was made. Firstly, the theory of the refractive focusing of the hourglass-shaped XCRL was analyzed. Then the hourglass-shaped XCRL was manufactured using back-mask exposure technology for the first time, which avoids two-time masking and reduces the transfer times of the figure. The refractive focusing performance of the lens was tested with 10 keV monochromatic X-ray. The experimental results indicated that it has good focusing performance in one dimension, which is in general coincident with the calculated results.
学科主题	Physics
类目[WOS]	Physics, Multidisciplinary
研究领域[WOS]	Physics
原文出处	SCI
语种	英语
WOS记录号	WOS:000264781600023
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/239402]
专题	高能物理研究所_多学科研究中心
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Yan-Qing, Z,Jing-Qiu, L,Zhong-Zhu, L,et al. Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology[J]. ACTA PHYSICA SINICA,2009,58(3):1526-1530.
APA	Yan-Qing, Z.,Jing-Qiu, L.,Zhong-Zhu, L.,Huang, XH.,Le, ZC.,...&王志立.(2009).Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology.ACTA PHYSICA SINICA,58(3),1526-1530.
MLA	Yan-Qing, Z,et al."Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology".ACTA PHYSICA SINICA 58.3(2009):1526-1530.