Microstructures of epitaxial thin films of YBa2Cu3O7-delta deposited on silicon wafers

	Microstructures of epitaxial thin films of YBa2Cu3O7-delta deposited on silicon wafers
	Mai, ZH; Chen, XM; Wang, Y; Gao, J; Li, TK; Wong, HY; Zheng, WL; Jia, QJ; Zheng WL(郑文莉); Jia QJ(贾全杰)
刊名	SUPERCONDUCTOR SCIENCE & TECHNOLOGY
	2003
卷号	16 期号:5 页码:590-594
通讯作者	Chinese Acad Sci, Inst Phys, Beijing 100080, Peoples R China ; Chinese Acad Sci, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China ; Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China ; Chinese Acad Sci, Inst High Energy Phys, Beijing Synchrotron Radiat Facil, Beijing 100039, Peoples R China
英文摘要	The microstructures of YBa2Cu3O7-delta (YBCO) thin films deposited on Si(001) wafers with an yttrium-stabilized ZrO2 (YSZ) single buffer or/and an Eu2CuO4(ECO)/YSZ double buffer layer were investigated by using high-resolution x-ray diffraction, small angle reflection and scanning electron microscopy (SEM), respectively. The results showed that the YBCO films were well oriented in the [001] direction perpendicular to the substrate surface. A thin intermediate layer of BaZrO3 was observed at the interface of YBCO/YSZ for samples with a YSZ single buffer. The composition of the YBCO film was also diverse from the 1-2-3 compound. In contrast, a well-defined interface was formed for samples with an ECO/YSZ double buffer. The film surface was more smooth and stable. The composition of the YBCO films was also found to approach that of the 1-2-3 compound. The results obtained indicate that highly epitaxial YBCO thin films could be successfully grown on Si wafers with a double buffer of ECO/YSZ. demonstrating advantages of such a double buffer structure.
学科主题	Physics
类目[WOS]	Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]	Physics
原文出处	SCI
语种	英语
WOS记录号	WOS:000183131100011
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/238047]
专题	高能物理研究所_多学科研究中心中国科学院高能物理研究所_人力资源处
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Mai, ZH,Chen, XM,Wang, Y,et al. Microstructures of epitaxial thin films of YBa2Cu3O7-delta deposited on silicon wafers[J]. SUPERCONDUCTOR SCIENCE & TECHNOLOGY,2003,16(5):590-594.
APA	Mai, ZH.,Chen, XM.,Wang, Y.,Gao, J.,Li, TK.,...&贾全杰.(2003).Microstructures of epitaxial thin films of YBa2Cu3O7-delta deposited on silicon wafers.SUPERCONDUCTOR SCIENCE & TECHNOLOGY,16(5),590-594.
MLA	Mai, ZH,et al."Microstructures of epitaxial thin films of YBa2Cu3O7-delta deposited on silicon wafers".SUPERCONDUCTOR SCIENCE & TECHNOLOGY 16.5(2003):590-594.