Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum

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	Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum
	Li SH(李帅辉); Shu YH(舒勇华); Tang JR(唐锦荣); Fan J(樊菁)
	2007
会议名称	8th Vacuum Metallurgy and Surface Engineering Conference
会议日期	JUN 16-19, 2007
会议地点	Shenyang, PEOPLES R CHINA
通讯作者	Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
中文摘要	Uniform temperature distribution over a substrate is one of the important issues in the vapor deposition of large - area films. We employ both numerical and experimental approaches to study the temperature distribution over a 6 - inch monocrystal silicon substrate radiated by a molybdenum filament heater in our PVD facility. An infrared colorimetric measurement shows that the mean temperature of the substrate is 1093 K under an electric power of 3860 W, and the maximum temperature difference between the center, and circumference is about 6 K. The calculated temperature distributions agree well with the experimental data, and further computational analysis shows that the shielding effect of the molybdenum filaments on radiation, the number of thermal insulation plates around the heater, and the thermal conduction of the heater walls and substrate all affect significantly the substrate temperature distribution. It is therefore needed to consider them in the design of high performance substrate heaters.
收录类别	CPCI-S
会议录	Vacuum Metallurgy and Surface Engineering, Proceedings/真空冶金与表面工程——第八届真空冶金与表面工程学术会议论文集
会议录出版者	PUBLISHING HOUSE ELECTRONICS INDUSTRY
会议录出版地	BEIJING ; PO BOX 173 WANSHOU ROAD, BEIJING 100036, PEOPLES R CHINA
语种	英语
ISBN号	978-7-121-04043-6
WOS记录号	WOS:000248081800042
内容类型	会议论文
源URL	[http://dspace.imech.ac.cn/handle/311007/58897]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Li SH,Shu YH,Tang JR,et al. Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum[C]. 见:8th Vacuum Metallurgy and Surface Engineering Conference. Shenyang, PEOPLES R CHINA. JUN 16-19, 2007.