Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system

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	Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system
	Zhao WR ; Jiang PF ; Xie FZ
	2002
会议名称	conference on optical design and testing
会议日期	oct 15-18, 2002
会议地点	shanghai, peoples r china
关键词	external cavity semiconductor laser interferometer far distance micro-vibration measurement feedback control DISPLACEMENT MEASUREMENT DIODE INTERFEROMETER PHASE
页码	770-774
通讯作者	zhao wr chinese acad sci inst semicond beijing 100083 peoples r china.
中文摘要	an external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. in the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. its coherent length exceeds 200 meters. the angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. a feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.
英文摘要	an external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. in the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. its coherent length exceeds 200 meters. the angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. a feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:26z (gmt). no. of bitstreams: 1 2797.pdf: 140672 bytes, checksum: ab8b19c4a6c1bc82326ad33a9697c925 (md5) previous issue date: 2002; spie.; chinese opt soc.; chinese acad sci, inst semicond, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	spie.; chinese opt soc.
会议录	optical design and testing, 4927
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	光电子学
语种	英语
ISSN号	0277-786x
ISBN号	0-8194-4716-1
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/13615]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Zhao WR,Jiang PF,Xie FZ. Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system[C]. 见:conference on optical design and testing. shanghai, peoples r china. oct 15-18, 2002.