MMI optical couplers and switches with SOI technology

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	MMI optical couplers and switches with SOI technology
	Yu JZ ; Wang XL ; Liu JW ; Yan QF ; Xia JS ; Fan ZC ; Wang ZT ; Chen SW
	2003
会议名称	6th chinese optoelectronics symposium
会议日期	sep 12-14, 2003
会议地点	kowloon, peoples r china
关键词	WAVE-GUIDES
页码	251-254
通讯作者	yu jz chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china.
中文摘要	mmi (multimode interference) coupler, modulator and switch based on soi (silicon- on-insulator) have been become more and more attractive in optical systems since they show important performances. sio2 thin cladding layers (<1.0mum) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. the design and fabrication of multimode interference (mmi) optical coupler, modulator and switche in soi technology are presented in the paper. the results demonstrated that the modulator has an extinction ratio of -11.0db and excess loss of -2.5db, while the optical switch has a crosstalk of -12.5db and responding time of less than 20 mus.
英文摘要	mmi (multimode interference) coupler, modulator and switch based on soi (silicon- on-insulator) have been become more and more attractive in optical systems since they show important performances. sio2 thin cladding layers (<1.0mum) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. the design and fabrication of multimode interference (mmi) optical coupler, modulator and switche in soi technology are presented in the paper. the results demonstrated that the modulator has an extinction ratio of -11.0db and excess loss of -2.5db, while the optical switch has a crosstalk of -12.5db and responding time of less than 20 mus.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:17z (gmt). no. of bitstreams: 1 2770.pdf: 238145 bytes, checksum: 86010dcefc7dbeaac07d8d04d80a8d3a (md5) previous issue date: 2003; hong kong baptist univ.; chinese univ hong kong.; city univ hong kong.; hong kong polytech univ.; univ hong kong.; ieee leos hong kong chapter.; aixtron ag.; kopin corp.; oxford instruments teltec semiconductor pacific ltd.; hong kong sci & technol pk corp.; soc informat display hong kong chapter.; chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	hong kong baptist univ.; chinese univ hong kong.; city univ hong kong.; hong kong polytech univ.; univ hong kong.; ieee leos hong kong chapter.; aixtron ag.; kopin corp.; oxford instruments teltec semiconductor pacific ltd.; hong kong sci & technol pk corp.; soc informat display hong kong chapter.
会议录	proceedings of the sixth chinese optoelectronics symposium
会议录出版者	ieee ; 345 e 47th st, new york, ny 10017 usa
会议录出版地	345 e 47th st, new york, ny 10017 usa
学科主题	光电子学
语种	英语
ISBN号	0-7803-7887-3
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/13573]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yu JZ,Wang XL,Liu JW,et al. MMI optical couplers and switches with SOI technology[C]. 见:6th chinese optoelectronics symposium. kowloon, peoples r china. sep 12-14, 2003.