Optimization of off-null ellipsometry for air/solid interfaces | |
Chen YY(陈艳艳) | |
刊名 | APPLIED OPTICS |
2007-12-10 | |
卷号 | 46期号:35页码:8475-8481 |
通讯作者 | Jin G |
合作状况 | 其它 |
英文摘要 | The optimization of off-null ellipsometry is described with emphasis on the improvement of sample thickness sensitivity. Optimal conditions are dependent on azimuth angle settings of the polarizer, compensator, and analyzer in a polarizer-compensator-sample-analyzer ellipsometer arrangement. Numerical simulation utilized offers an approach to present the dependence of the sensitivity on the azimuth angle settings, from which optimal settings corresponding to the best sensitivity are derived. For a series of samples of SiO2 layer (thickness in the range of 1.8-6.5 nm) on silicon substrate, the theory analysis proves that sensitivity at the optimal settings is increased 20 times compared to that at null settings used in most works, and the relationship between intensity and thickness is simplified as a linear type instead of the original nonlinear type, with the relative error reduced to similar to 1/100 at the optimal settings. Furthermore the discussion has been extended toward other factors affecting the sensitivity of the practical system, such as the linear dynamic range of the detector, the signal-to-noise ratio and the intensity from the light source, etc. Experimental results from the investigation Of SiO2 layer on silicon substrate are chosen to verify the optimization. |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000252229000011 |
公开日期 | 2010-01-15 |
内容类型 | 期刊论文 |
源URL | [http://58.210.77.100/handle/332007/169] |
专题 | 苏州纳米技术与纳米仿生研究所_纳米生物医学与安全研究部_戴建武团队 |
推荐引用方式 GB/T 7714 | Chen YY. Optimization of off-null ellipsometry for air/solid interfaces[J]. APPLIED OPTICS,2007,46(35):8475-8481. |
APA | Chen YY.(2007).Optimization of off-null ellipsometry for air/solid interfaces.APPLIED OPTICS,46(35),8475-8481. |
MLA | Chen YY."Optimization of off-null ellipsometry for air/solid interfaces".APPLIED OPTICS 46.35(2007):8475-8481. |
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