Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system
	Wu, Jinfeng 1; He NR(何乃如)1 ; Li HX(李红轩)2 ; Liu XH(刘晓红)2 ; Ji L(吉利)2 ; Huang, Xiaopeng 1; Chen JM(陈建敏)2
刊名	Surface and Interface Analysis
	2015
卷号	47 期号:2 页码:184-191
关键词	hybrid PVD coating system TiAlSiN films microstructure mechanical properties and oxidation resistance
ISSN号	0142-2421
通讯作者	Wu, Jinfeng
英文摘要	TiAlSiN coatings with different Si contents were deposited on silicon and high-temperature alloy by using a hybrid physical vapor deposition coating system, where the cathodic arc ion plating was combined with a twin target mid-frequency magnetron sputtering. The chemical composition, microstructure, cross-sectional structure and morphology were carried out by X-ray photoelectron spectroscope (XPS), X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and transmission electron microscope (TEM), respectively. NanoTest 600 nanomechanical system and ball-on-disc friction tester were used to investigate the mechanical and friction properties of TiAlSiN coatings. The worn surface of the TiAlSiN coatings and counterballs were investigated by means of surface profilometer and optical microscope. The wear rates were also measured by surface profilometer. The results showed that the Si addition did not change the coatings growth orientation, and the coating transfered into amorphous phase when the Si content reached about 13.9 at.%. The tribological properties and the hardness were improved by solid solution of Si atoms and grain boundary strengthening of SiN_x amorphous phase with moderate Si content addition. In addition, the SiNx amorphous phase improved oxidation resistance of TiAlN coating, but with a high Si content (more than 8.3 at.% in this work) the agglomeration of SiN_x amorphous phase would reduce the mechanical properties and oxidation resistance of the coating.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (51065001)
语种	英语
WOS记录号	WOS:000348523000003
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/19297]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
作者单位	1.Gansu Agr Univ, Sch Engn, Lanzhou 730070, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Wu, Jinfeng,He NR,Li HX,et al. Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system[J]. Surface and Interface Analysis,2015,47(2):184-191.
APA	Wu, Jinfeng.,He NR.,Li HX.,Liu XH.,Ji L.,...&Chen JM.(2015).Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system.Surface and Interface Analysis,47(2),184-191.
MLA	Wu, Jinfeng,et al."Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system".Surface and Interface Analysis 47.2(2015):184-191.