Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse
	Wang J(汪佳)1,2 ; Cao ZY(曹忠跃)1,2 ; Pan FP(潘富平)1,2 ; Wang FG(王富国)1 ; Liang AM(梁爱民)1 ; Zhang JY(张俊彦)1 ; Wang FG(王富国); Zhang JY(张俊彦)
刊名	Applied Surface Science
	2015
卷号	356 页码:695-700
关键词	a-C:H film Bias voltage Microstructure Mechanical properties Tribological properties
ISSN号	0169-4332
通讯作者	王富国 ; 张俊彦
英文摘要	Amorphous hydrogenated carbon (a-C:H) films were prepared by high frequency unipolar pulse plasma-enhanced chemical vapor deposition in CH4, Ar, and H-2 atmosphere with the bias voltage in the range of -800 - -1600 V. The microstructures and mechanical properties of a-C:H films were investigated via high resolution transmission electron microscope (HRTEM), Raman spectroscopy, and Nanoindenter. The results reveal that the curved and straight graphitic microstructures appear in amorphous carbon matrix, and their contents increase obviously with the bias voltage. At the same time, the corresponding hardness decreases and elastic recovery increases, however even in such a case films still possess excellent mechanical properties. According to the tribological property characterization, we believe that the bias voltage also influences their tribological performances significantly, the higher the bias voltage finally gets, the lower the friction coefficient and wear rate occur. These results indicate that the microstructures of a-C:H films can be tuned efficiently by bias voltage and the films with good mechanical and tribological properties can be obtained at a higher range.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the Major State Basic Research Development Program of China (973 Program) (No. 2013CB632304)
语种	英语
WOS记录号	WOS:000365351600090
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/19116]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Wang FG(王富国); Zhang JY(张俊彦)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Wang J,Cao ZY,Pan FP,et al. Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse[J]. Applied Surface Science,2015,356:695-700.
APA	Wang J.,Cao ZY.,Pan FP.,Wang FG.,Liang AM.,...&张俊彦.(2015).Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse.Applied Surface Science,356,695-700.
MLA	Wang J,et al."Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse".Applied Surface Science 356(2015):695-700.